Nakatsuka Laboratory, Nagoya Univ.
Last update: October 26, 2024
Presentations
2024
- "Efficient Reverse Current Reduction of GeSn-Based pn Diodes by Surface Passivation
of ALD-GeO2 and Al2O3 Stacked Structure",
Y. Kato, M. Sakashita, M. Kurosawa, O. Nakatsuka, and S. Shibayama,
International Conference on Solid State Devices and Materials (SSDM2024),
Himeji, Japan, Sept. 1-4, 2024.
- "Impacts of Mechanical Uniaxial Stress on Mobility Enhancement of 4H-SiC trench MOSFET ",
M. Inayoshi, N. Hikosaka, R. Kamiya, E. Kagoshima, S. Shibayama, M. Sakashita, H. Tomita,
T. Nishiwaki, H. Fujiwara, O. Nakatsuka, N. Taoka, W. Takeuchi,
International Conference on Solid State Devices and Materials (SSDM2024),
Himeji, Japan, Sept. 1-4, 2024.
- "GeSn on Insulator Metal-Semiconductor-Metal Photodetector By Layer Transfer Technique",
T. Maeda, H. Ishii, W. H. Chang, T. Takagi, S. Shibayama, M. Kurosawa, and O. Nakatsuka,
International Conference on Solid State Devices and Materials (SSDM2024),
Himeji, Japan, Sept. 1-4, 2024.
- "Influence of hydrogen desorption temperature on interlayer distance of
multilayered GeH nanosheets under ultrahigh vacuum ambient",
K. Matsumoto, M. Araidai, S. Shibayama, M. Sakashita, O. Nakatsuka,
T. Nishimura, K. Nagashio, and M. Kurosawa,
International Conference on Solid State Devices and Materials (SSDM2024),
Himeji, Japan, Sept. 1-4, 2024.
- "Comprehensive study on crystal growth of CaSi2 layers
on Si(111) using solid phase epitaxy",
K. Kato, S. Shibayama, M. Sakashita, O. Nakatsuka, and M. Kurosawa,
International Conference on Solid State Devices and Materials (SSDM2024),
Himeji, Japan, Sept. 1-4, 2024.
- [Invited]
"Recent Progress on Heteroepitaxy of Si-Sn Alloy Thin Films",
M. Kurosawa, S. Shibayama, M. Sakashita, and O. Nakatsuka,
248th ECS Meeting / Pacific Rim Meeting on Electrochemical & Solid-State Science (PRiME) 2024,
Honolulu, USA, Oct. 6-11, 2024.
- "Comprehensive study on epitaxial growth of GeSn(111) layers
with high Sn content on Si(111) featuring Ge buffer layer",
S. Shibayama, S. Mori, Y. Kato, M. Sakashita, M. Kurosawa, and O. Nakatsuka,
248th ECS Meeting / Pacific Rim Meeting on Electrochemical & Solid-State Science (PRiME) 2024,
Honolulu, USA, Oct. 6-11, 2024.
- [Invited]
"Exploration and Development of Very-High-Sn-Content Ge1-xSnx Epitaxy
for Electronic and Optoelectronic Applications",
O. Nakatsuka, S. Shibayama, M. Kurosawa, and M. Sakashita,
15th International WorkShop on New Group IV Semiconductor Nanoelectronics,
Sendai, Japan, Oct. 21-22, 2024.
- [Invited]
"Giant thermoelectric power observed in group-IV-based films
with high carrier concentrations at low temperatures",
M. Kurosawa, T. Katase, S. Shibayama, M. Sakashita, and O. Nakatsuka,
15th International WorkShop on New Group IV Semiconductor Nanoelectronics,
Sendai, Japan, Oct. 21-22, 2024.
- [Invited]
"New interests of Ge1-x-ySixSny/Ge1-xSnx
heterostructures for electronic device applications",
S. Shibayama, S. Ishimoto, Y. Kato, M. Sakashita, M. Kurosawa, and O. Nakatsuka,
15th International WorkShop on New Group IV Semiconductor Nanoelectronics,
Sendai, Japan, Oct. 21-22, 2024.
- "Formation of methylated germanane multilayers from CaGe2 epitaxial layers on Ge(111)",
A. Nakayama, K. Matsumoto, S. Shibayama, M. Sakashita, O. Nakatsuka, and M. Kurosawa,
15th International WorkShop on New Group IV Semiconductor Nanoelectronics,
Sendai, Japan, Oct. 21-22, 2024.
- "Segregation induced GeSn nanosheet formation through Al and
Ge1-xSnx epitaxial layers",
T. Matsumoto, A. Ohta, R. Yokogawa, M. Sakashita, M. Kurosawa, O. Nakatsuka, and S. Shibayama,
15th International WorkShop on New Group IV Semiconductor Nanoelectronics,
Sendai, Japan, Oct. 21-22, 2024.
2023
- [Invited]
"Challenge and new opportunity of Ge1-x-ySixSny/Ge1-xSnx
heterostructures for optoelectronic and electronic device applications",
S. Shibayama, S. Zhang, M. Sakashita, M. Kurosawa, and O. Nakatsuka,
13th International WorkShop on New Group IV Semiconductor Nanoelectronics,
Sendai, Japan, Jan. 23-24, 2023.
- "N-type characteristics of undoped GeSn in the low Sn concentration region",
N. Shimizu, Y. Wang, A. Honda, K. Yamamoto, S. Zhang, S. Shibayama, O. Nakatsuka, and D. Wang,
13th International WorkShop on New Group IV Semiconductor Nanoelectronics,
Sendai, Japan, Jan. 23-24, 2023.
- [Invited]
"Epitaxial Germanide/Germanium Contact: Its Impact on Schottky Barrier Height",
O. Nakatsuka, S. Shibayama, M. Sakashita, and M. Kurosawa,
13th International WorkShop on New Group IV Semiconductor Nanoelectronics,
Sendai, Japan, Jan. 23-24, 2023.
- "Heteroepitaxy of Ge1-xSnx with a high Sn content over 25%
on InP(001) toward group-IV infrared detector",
K. Takagi, S. Shibayama, M. Sakashita, M. Kurosawa, and O. Nakatsuka,
13th International WorkShop on New Group IV Semiconductor Nanoelectronics,
Sendai, Japan, Jan. 23-24, 2023.
- "Crystalline and electrical properties of Ge1-x-ySixSny
epitaxial layers - Effect of Si incorporation and H2 irradiation -",
K. Nishizawa, S. Shibayama, T. Mori, M. Sakashita, M. Kurosawa, and O. Nakatsuka,
13th International WorkShop on New Group IV Semiconductor Nanoelectronics,
Sendai, Japan, Jan. 23-24, 2023.
- "Development of accurate characterization technique of electrical properties
in Ge1-xSnx-based group-IV epitaxial layers",
T. Mori, S. Shibayama, K. Nishizawa, M. Sakashita, M. Kurosawa, and O. Nakatsuka,
13th International WorkShop on New Group IV Semiconductor Nanoelectronics,
Sendai, Japan, Jan. 23-24, 2023.
- "Arising ferroelectric properties in ZrO2 thin film down to 4 nm",
S. Ikeguchi, J. Nagano, M. Sakashita, M. Kurosawa, O. Nakatsuka, and S. Shibayama,
13th International WorkShop on New Group IV Semiconductor Nanoelectronics,
Sendai, Japan, Jan. 23-24, 2023.
- "N-type characteristics of undoped Ge0.967Sn0.033 fabricated on bulk n-Ge",
N. Shimizu, Y. Wang, A. Honda, K. Yamamoto, S. Zhang, S. Shibayama, O. Nakatsuka, and D. Wang,
The International Conference on Silicon Epitaxy and Heterostructures and
the International SiGe Technology and Device Meetings (ICSI/ISTDM2023),
Como, Italy, May 21-25, 2023.
- "Low-temperature Thermoelectric Properties of GeSn Alloys Films",
M. Kurosawa, T. Katase, Y. Imai, M. Nakata, M. Kimura, T. Kamiya,
S. Shibayama, M. Sakashita, and O. Nakatsuka,
The International Conference on Silicon Epitaxy and Heterostructures and
the International SiGe Technology and Device Meetings (ICSI/ISTDM2023),
Como, Italy, May 21-25, 2023.
- "Heteroepitaxial Growth of High Substitutional Sn-content
Ge1−xSnx Layer Lattice-matched on InP Substrate",
O. Nakatsuka, K. Takagi, S. Shibayama, M. Kurosawa, and M. Sakashita,
The International Conference on Silicon Epitaxy and Heterostructures and
the International SiGe Technology and Device Meetings (ICSI/ISTDM2023),
Como, Italy, May 21-25, 2023.
- "The layer transfer of Ge-lattice-matched SiGeSn epitaxial films",
T. Maeda, H. Ishii, W. H. Chang, S. Zhang, S. Shibayama, M. Kurosawa, O. Nakatsuka,
The International Conference on Silicon Epitaxy and Heterostructures and
the International SiGe Technology and Device Meetings (ICSI/ISTDM2023),
Como, Italy, May 21-25, 2023.
- [Invited]
"Epitaxy and heterostructure of germanium tin-related group-IV alloy semiconductors
for future electronic and optoelectronic applications"
O. Nakatsuka, M. Kurosawa, S. Shibayama, M. Sakashita,
2023 International Conference on Semiconductor Technology for Ultra Large Scale
Integrated Circuits and Thin Film Transistors (ULSIC VS TFT 8),
Otaru, Japan, May 14-18, 2023.
- "Experimental observation of negative differential resistance in
GeSn/GeSiSn double barrier structure toward resonant tunneling diode applications",
S. Ishimoto, M. Sakashita, M. Kurosawa, O. Nakatsuka, and S. Shibayama,
International Conference on Solid State Devices and Materials (SSDM2023),
Nagoya, Japan, Sept. 5-8, 2023.
- "Seed-layer driven solid phase epitaxy of amorphous Ge1−xSnx
layers on Si(001) substrates toward in-plane strain control",
T. Hiraide, M. Kurosawa, S. Shibayama, M. Sakashita, O. Nakatsuka, and T. Hiraide,
International Conference on Solid State Devices and Materials (SSDM2023),
Nagoya, Japan, Sept. 5-8, 2023.
- "Giant thermoelectric power of n-type Si1−xSnx
layers grown on FZ-Si(001) substrates",
T. Oiwa, S. Shibayama, M. Sakashita, O. Nakatsuka, T. Katase, and M. Kurosawa,
International Conference on Solid State Devices and Materials (SSDM2023),
Nagoya, Japan, Sept. 5-8, 2023.
- "Low-temperature thermoelectric power-factor enhancement of n-type Ge-rich
Ge1−x−ySixSny layers",
I. Sugimura, M. Nakata, S. Shibayama, M. Sakashita, and O. Nakatsuka,
International Conference on Solid State Devices and Materials (SSDM2023),
Nagoya, Japan, Sept. 5-8, 2023.
- "Optoelectronic properties of Ge1−xSnx/high-Si-content
SiyGe1−y−zSnz double quantum wells
formed by low-temperature MBE growth and post deposition annealing",
S. Shibayama, S. Zhang, M. Sakashita, M. Kurosawa, and O. Nakatsuka,
International Conference on Solid State Devices and Materials (SSDM2023),
Nagoya, Japan, Sept. 5-8, 2023.
- [Invited]
"Epitaxial Growth Technique for Si1-xSnx Binary Alloy Thin Films",
M. Kurosawa, S. Shibayama, M. Sakashita, and O. Nakatsuka,
244th ECS Meeting, Digital Meeting,
Gothenburg, Sweden, Oct. 8-12, 2023.
- "Sputtering Heteroepitaxy of Ge0.75Sn0.25 Layer on InP(001) Substrate",
T. Kabeya, S. Shibayama, K. Takagi, M. Sakashita, M. Kurosawa, and O. Nakatsuka,
2023 International Workshop on DIELECTRIC THIN FILMS FOR FUTURE ELECTRON DEVICES
- SCIENCE AND TECHNOLOGY - (IWDTF2023), pp. 129 - 130,
Kanazawa, Japan, Oct. 23-25, 2023.
- [Invited]
"Crystal Growth Technology of GeSn-related Group-IV Heteroepitaxial Layers",
O. Nakatsuka, S. Shibayama, M. Kurosawa, and M. Sakashita,
3rd Nucleation and Growth Research Conference (NGRC),
Kyoto, Japan, Nov. 9-11, 2023.
- "Observation of acceptor-type defect levels using low-temperature Hall effect measurement
for GeSn layers fabricated by molecular beam epitaxy",
A. Honda, N. Shimizu, Y. J. Feng, K. Yamamoto, S. Shibayama, O. Nakatsuka, and D. Wang,
14th International Workshop on New Group IV Semiconductor Nanoelectronics,
pp. 23-24, Sendai, Japan, Dec. 14-15, 2023.
- [Invited]
"A new challenges in group-IV materials: energy harvesting application & 2D crystal synthesizing",
M. Kurosawa, A. Ohta, M. Araidai, S. Shibayama, M. Sakashita, and O. Nakatsuka,
14th International Workshop on New Group IV Semiconductor Nanoelectronics,
Sendai, Japan, Dec. 14-15, 2023.
- "Electrical activation of implanted phosphorus in GeSn epitaxial layers grown on Si(111) substrate",
Y. Kato, M. Fukuda, S. Shibayama, M. Sakashita, M. Kurosawa, and O. Nakatsuka,
14th International Workshop on New Group IV Semiconductor Nanoelectronics,
pp. 41-42, Sendai, Japan, Dec. 14-15, 2023.
- "Thermoelectric properties of Sb-doped Ge1-x-ySixSny
ternary alloy layers lattice matched to GaAs substrates",
I. Sugimura, M. Nakata, S. Shibayama, M. Sakashita, O. Nakatsuka, T. Katase, and M. Kurosawa,
14th International Workshop on New Group IV Semiconductor Nanoelectronics,
pp. 49-50, Sendai, Japan, Dec. 14-15, 2023.
2022
- "Formation of non-equilibrium Ge1-xSnx/SixGe1-x-ySny
double-quantum wells and its photoluminescence property",
S. Zhang, S. Shibayama, and O. Nakatsuka,
14th International Symposium on Advanced Plasma Scienceand its Applications for Nitrides and Nanomaterials /
15th International Conference on Plasma-Nano Technology & Science, (ISPlasma2022/IC-PLANTS2022),
Online, March 6-10, 2022.
- "Formation of calcium disilicide films on Si(111) using molecular beam epitaxy",
Y. Ito, O. Nakatsuka, and M. Kurosawa,
14th International Symposium on Advanced Plasma Scienceand its Applications for Nitrides and Nanomaterials /
15th International Conference on Plasma-Nano Technology & Science, (ISPlasma2022/IC-PLANTS2022),
Online, March 6-10, 2022.
- "Substrate engineering for strain-controlled high-Sn-content Ge1-xSnx epitaxy",
O. Nakatsuka, S. Shibayama, M. Kurosawa, and M. Sakashita,
The 6th Asia-Pacific Conference on Semiconducting Silicides and Related Materials, 2022 (APAC-Silicide 2022),
Online, July 30-Aug.1, 2022.
- "Sn-driven Self-formation of Ge1−xSnx Nanodots on Insulator for Multi-layered Quantum Dots Structure",
K. Hashimoto, S. Shibayama, K. Asaka, M. Kurosawa, and O. Nakatsuka,
9th International Symposium on Control of Semiconductor Interfaces (ISCSI-IX),
Hybrid style (Nagoya, Japan), Sept.5-8, 2022.
- "Molecular Beam Epitaxy of CaGe2 Layers on Si(111) Substrate",
K. Okada, S. Shibayama, O. Nakatsuka, and M. Kurosawa,
9th International Symposium on Control of Semiconductor Interfaces (ISCSI-IX),
Hybrid style (Nagoya, Japan), Sept.5-8, 2022.
- "Molecular beam epitaxy of Si1−xSnx layers
with 10%-Sn content on Si1−yGey buffers"
K. Fujimoto, S. Shibayama, M. Sakashita, M. Kurosawa, and O. Nakatsuka,
International Conference on Solid State Devices and Materials (SSDM2022),
Hybrid (Makuhari, Japan), Sept. 26-29, 2022.
- "Study on doping by ion implantation to Si1−xSnx epitaxial layers",
T. Oiwa, S. Shibayama, M. Sakashita, M. Kurosawa, and O. Nakatsuka,
International Conference on Solid State Devices and Materials (SSDM2022),
Hybrid (Makuhari, Japan), Sept. 26-29, 2022.
- "Formation of ferroelectric ZrO2 film in ultra-thin region by sputtering method",
S. Shibayama, J. Nagano, M. Sakashita, and O. Nakatsuka,
International Conference on Solid State Devices and Materials (SSDM2022),
Hybrid (Makuhari, Japan), Sept. 26-29, 2022.
- "Impact of Strain Structure in Epitaxial HfGe2/n-Ge(001) Contact on Morphology and Schottky Barrier Height",
O. Nakatsuka, K. Kasahara, S. Shibayama, M. Sakashita, and M. Kurosawa,
Advanced Metallization Conference 2022 (ADMETA2022):
31th Asian Session Conference, Hybrid (Tokyo, Japan), Oct. 12-14, 2022.
- "Synthesis of multilayer two-dimensional group-IV flakes and nanosheets",
M. Kurosawa, M. Itoh, Y. Ito, K. Okada, A. Ohta, M. Araidai, K. O. Hara,
Y. Ando, S. Yamada, S. Shibayama, M. Sakashita, and O. Nakatsuka,
33rd International Photovoltaic Science and Engineering Conference (PVSEC-33),
Nagoya, Japan, Nov. 13-17, 2022
- [Invited]
"Research and Development of GeSn-related Group-IV Semiconductor Heterostructures for Optoelectronic Applications",
O. Nakatsuka, S. Shibayama, M. Kurosawa, and M. Sakashita,
Symposium on Light emission and Photonics of Group IV semiconductor Nanostructures (LPGN),
Nagoya, Japan, Dec. 14, 2022
2021
- "Epitaxial growth of strain-relaxed and high-Sn-content
n-Ge1-xSnx on Si(111) substrate with Ge buffer layer",
A. Huang, S. Shibayama, and O. Nakatsuka,
The 8th Asian Conference on Crystal Growth and Crystal Technology (CGCT),
On-Line Conference, March 1-4, 2020.
- "Heterostructure design favorable for n+-Ge1-xSnx
pseudo-direct transition layer for optoelectronic application ",
S. Zhang, M. Fukuda, S. Shibayama, and O. Nakatsuka,
13th International Symposium on Advanced Plasma Scienceand its Applications for Nitrides and Nanomaterials /
14th International Conference on Plasma-Nano Technology & Science, (ISPlasma2021/IC-PLANTS2021),
Virtual symposium, March 7-11, 2021.
- "Formation and Characterization of Ge1-x-ySixSny/Ge
Heterojunction Structures for Photovoltaic Cell Application",
O. Nakatsuka, S. Asaba, M. Kurosawa, M. Sakashita, N. Taoka, and S. Zaima,
239th ECS Meeting, Digital Meeting, May 30-June 3, 2021.
- [Invited]
"Effects of post-formation treatment on electrical properties in 4H-SiC MOS capacitors",
W. Takeuchi, T. Doi, S. Shibayama, M. Sakashita, and O. Nakatsuka,
THERMEC '2021 - International Conference on Processing & Manufactoring of advanced Materials,
Virtual Conference, June 1-5, 2021.
- "Improved interface uniformity of epitaxial HfGe2/Ge(001) contact
by microfabrication and its electron conduction property",
K. Kasahara, K. Senga, M. Sakashita, S. Shibayama, and O. Nakatsuka,
The 20th International Workshop on Junction Technology 2021 (IWJT2021),
On-line, June 10-11, 2021.
- [Invited]
"Group-IV Materials Grown on Insulator for Advanced Thin-film Thermoelectric Applications",
M. Kurosawa and O. Nakatsuka,
International Conference on Solid State Devices and Materials (SSDM2021),
ALL-VIRTUAL Conference, Sept. 6-9, 2021.
- "Hydrogen desorption from multilayer germanane flakes
under an ultrahigh vacuum environment",
M. Itoh, M. Araidai, A. Ohta, O. Nakatsuka, and M. Kurosawa,
International Conference on Solid State Devices and Materials (SSDM2021),
ALL-VIRTUAL Conference, Sept. 6-9, 2021.
- "Solid-phase crystallization of ultra-thin amorphous Ge layers on insulators",
R. Oishi, M. Kurosawa, and O. Nakatsuka,
International Conference on Solid State Devices and Materials (SSDM2021),
ALL-VIRTUAL Conference, Sept. 6-9, 2021.
- "Enhancement of Channel Mobility in 4H-SiC Trench MOSFET
by Inducing Stress at SiO2/SiC Gate Interface",
E. Kagoshima, W. Takeuchi, K. Kutsuki, M. Sakashita, H. Fujiwara, and O. Nakatsuka,
International Conference on Solid State Devices and Materials (SSDM2021),
ALL-VIRTUAL Conference, Sept. 6-9, 2021.
- "Characterization of Local Strain in 4H-SiC Trench MOSFET by Synchrotron Nanobeam X-ray Diffraction",
W. Takeuchi, E. Kagoshima, K. Sumitani, Y. Imai, S. Shibayama, M. Sakashita,
S. Kimura, H. Tomita, T. Nishiwaki, H. Fujiwara, O. Nakatsuka,
International Conference on Solid State Devices and Materials (SSDM2021),
ALL-VIRTUAL Conference, Sept. 6-9, 2021.
- "Optoelectronic properties of heterostructures based on
pseudo-direct-bandgap transition n+-Ge1-xSnx active layer",
S. Zhang and O. Nakatsuka,
The 2nd International Workshop on Advanced Nanomaterials for Future Electron Devices 2021 (IWAN2021),
ALL-VIRTUAL conference, Sept. 24, 2021.
- [Invited]
"Thermoelectric Properties of Tin-Incorporated Group-IV Thin Films",
M. Kurosawa and O. Nakatsuka,
The 232nd Electron Chemical Society (ECS) Meeting,
Digital Meeting, Oct. 10-14, 2021.
- "Schottky barrier height lowering for metal/n-type 4H-SiC contacts using low work function metals",
T. Doi, S. Shibayama, M. Sakashita, M. Shimizu, and O. Nakatsuka
International Conference on Materials and Systems for Sustainability 2021 (ICMaSS2021),
Online, Nov. 4-6, 2021.
- "Optoelectronic properties of pseudo-direct transition n+-GeSn
and heterostructures composed of n+-GeSn and n-SiGe thin layers",
S. Zhang, M. Sakashita, S. Shibayama, and O. Nakatsuka,
International Conference on Materials and Systems for Sustainability 2021 (ICMaSS2021),
Online, Nov. 4-6, 2021.
- "Enhancement of the Field-Effect Mobility of 4H-SiC Buried Channel
n-MOSFETs by Using Al2O3 as a Gate Insulator",
T. Doi, S. Shibayama, M. Sakashita, N. Taoka, M. Shimizu, and O. Nakatsuka,
2021 International Workshop on DIELECTRIC THIN FILMS FOR FUTURE ELECTRON DEVICES - SCIENCE AND TECHNOLOGY - (IWDTF2021)
On-line virtual, Nov. 14-16, 2021.
2020
- "Understanding wet annealing effect on phase transition and ferroelectric phase formation
for Hf1-xZrxO2 film",
S. Shibayama, J. Nagano, M. Sakashita, and O. Nakatsuka,
2020 Inthernational Conference on Solid State Devices and Materials (SSDM2020),
All-virtual conferece, Japan, Sept. 27-30, 2020.
- [Invited]
"Heteroepitaxy and Strain Engineering of Germanium-Silicon-Tin
Ternary Alloy Semiconductor Thin Films for Energy Band Design",
O. Nakatsuka, S. Shibayama, M. Kurosawa, and M. Sakashita,
Pacificrim Meeting on Electrochemical and Solid-State Science (PRiME2020),
Online event, Oct. 4-9, 2020.
- "Crystal Growth of Epitaxial 3C-SiC Thin Film on Si Substrate
By Chemical Vapor Deposition using Single Precursor of Vinylsilane",
T. Doi, K. Hashimoto, W. Takeuchi, and O. Nakatsuka,
Pacificrim Meeting on Electrochemical and Solid-State Science (PRiME2020),
Online event, Oct. 4-9, 2020.
2019
- "Formation of Strain-relaxed Ge1-x-ySixSny
Epitaxial Layer Using Ion-implanted Ge Substrate",
H. Sofue, M. Fukuda, S. Shibayama, O. Nakatsuka, and S. Zaima,
11th International Symposium on Advanced Plasma Scienceand its Applications for Nitrides
and Nanomaterials / 12th International Conference on Plasma-Nano Technology & Science,
(ISPlasma2019/IC-PLANTS2019),
Nagoya, Japan, Mar. 17-21, 2019.
- [Invited]
"Development and challenges of group-IV alloy semiconductors for nanoelectronic applications",
S. Zaima, O. Nakatsuka, M. Kurosawa, M. Sakashita, and S. Shibayama,
The 11th International Conference on High Performance Ceramics (CICC-11),
Kunming, China, May 25-29, 2019.
- "Tin-Incorporation Effect on Thermoelectric Properties of
p-type Polycrysalline Si1-xGex",
Y. Peng, L. Miao, J. Gao, M. Kurosawa, O. Nakatsuka, and S. Zaima,
The 11th International Conference on High Performance Ceramics (CICC-11),
Kunming, China, May 25-29, 2019.
- "Further reduction of Schottky barrier height of Hf-germanide/n-Ge(001)
contacts by forming epitaxial HfGe2",
K. Senga, S. Shibayama, M. Sakashita, S. Zaima, and O. Nakatsuka,
19th International Workshop on Junction Technology 2019,
Kyoto, Japan, June 6-7, 2019.
- [Invited]
"GeSn and GeSiSn Heterostructures for Optoelectronic Applications",
O. Nakatsuka, M. Fukuda, M. Kurosawa, M. Sakashita, S. Shibayama, and S. Zaima,
2019 IEEE Photonics Society Summer Topical Meeting Series (IEEE/SUM),
Fort Lauderdale, USA, July 8-10, 2019.
- "In-situ cyclic metal layer oxidation for further improving interface properties of Al2O3/4H-SiC(0001) gate stacks",
T. Doi, S. Shibayama, W. Takeuchi, M. Sakashita, N. Taoka, M. Shimizu, and O. Nakatsuka,
International Conference on Solid-State Devices and Materials (SSDM2019),
Nagoya, Japan, Sept. 2-5, 2019.
- "Fermi level pinning at metal/4H-SiC contact induced by SiCxOy interlayer",
K. Hashimoto, T. Doi, S. Shibayama, and O. Nakatsuka,
International Conference on Solid-State Devices and Materials (SSDM2019),
Nagoya, Japan, Sept. 2-5, 2019.
- "Influence of Dopant on Thermoelectric Properties of Si-rich Poly-Si1−xSnx Layers Grown on Insulators",
K. Sato, O. Nakatsuka, and M. Kurosawa,
International Conference on Solid-State Devices and Materials (SSDM2019),
Nagoya, Japan, Sept. 2-5, 2019.
- "Strain Relaxation Enhancement of Ge1-x-ySixSny Epitaxial Layer on Ge Substrate Using Ion-Implantation Method",
H. Sofue, M. Fukuda, S. Shibayama, S. Zaima, and O. Nakatsuka,
International Conference on Solid-State Devices and Materials (SSDM2019),
Nagoya, Japan, Sept. 2-5, 2019.
- "Impact of Mechanical Uniaxial Stress on Mobility Enhancement of 4H-SiC (0001) MOSFET",
W, Takeuchi, K. Kutsuki, E. Kagoshima, T. Onishi, S. Iwasaki, M. Sakashita, H. Fujiwara, and O. Nakatsuka,
International Conference on Solid-State Devices and Materials (SSDM2019),
Nagoya, Japan, Sept. 2-5, 2019.
- "Saturation of Sb1+ Concentration
in Heavily Sb-doped n+-Ge Epitaxial Layers",
J. Jeon, S. Shibayama, and O. Nakatsuka,
Advanced Metallization Conference 2019 (ADMETA2019):
29th Asian Session Conference, Tokyo, Japan, Oct. 9-11, 2019.
- "Saturation of Activated Sb Atom in Heavily Sb-Doped Ge Epitaxial Thin Films",
J. Jeon, S. Shibayama, S. Zaima, and O. Nakatsuka,
International Conference on Materials and Systems for Sustainability 2019 (ICMaSS2019).
Nagoya, Japan, Nov. 1-3, 2019.
- "Improvement of thermoelectric properties of
Si1-x-yGexSny thin films
by ion implantation and rapid thermal annealing",
Y. Peng, L. Miao, M. Kurosawa, and O. Nakatsuka,
International Conference on Materials and Systems for Sustainability 2019 (ICMaSS2019),
Nagoya, Japan, Nov. 1-3, 2019.
- "Model development of MOCVD growth for realizing high-Sn-content
Ge1-xSnx epitaxial layer
~ What physical properties are required for precursors? ~"
Y. Miki, S. Shibayama, S. Zaima, and O. Nakatsuka,
International Conference on Materials and Systems for Sustainability 2019 (ICMaSS2019),
Nagoya, Japan, Nov. 1-3, 2019.
- "Optoelectronic Property of GeSn and GeSiSn Heterostructure"
M. Fukuda, M. Sakashita, S. Shibayama, M. Kurosawa, S. Zaima, and O. Nakatsuka,
International Conference on Materials and Systems for Sustainability 2019 (ICMaSS2019),
Nagoya, Japan, Nov. 1-3, 2019.
- "Development of in-situ cyclic metal layer oxidation to form abrupt
Al2O3/4H-SiC interface",
T. Doi, S. Shibayama, W. Takeuchi, M. Sakashita, N. Taoka, M. Shimizu, and O. Nakatsuka,
International Conference on Materials and Systems for Sustainability 2019 (ICMaSS2019).
Nagoya, Japan, Nov. 1-3, 2019.
- "Theoretical Investigation of Self-organization Behavior of
Si0.5Sn0.5 Nano-particles",
Y. Nagae, M. Kurosawa, and O. Nakatsuka,
International Conference on Materials and Systems for Sustainability 2019 (ICMaSS2019).
Nagoya, Japan, Nov. 1-3, 2019.
- "Thermoelectric properties of silicon germanium wires with a composition gradient",
M. Nakata, O. Nakatsuka, M. Tomita, T. Watanabe, and M. Kurosawa,
International Conference on Materials and Systems for Sustainability 2019 (ICMaSS2019).
Nagoya, Japan, Nov. 1-3, 2019.
- "Ferroelectric Phase Evolution of Undoped ZrO2
Thin Film by Wet O2 Annealing Process",
S. Shibayama, J. Nagano, M. Sakashita, O. Nakatsuka,
2019 International Workshop on DIELECTRIC THIN FILMS FOR FUTURE ELECTRON
DEVICES - SCIENCE AND TECHNOLOGY - (IWDTF2019)
Tokyo, Japan, Nov. 18-20, 2019.
- "In-situ Sb Doping into Ge1−xSnx Epitaxial Layer
toward Enhancement of Photoluminescence Intensity"
M. Fukuda, J. Jeon, M. Sakashita, S. Shibayama, M. Kurosawa, and O. Nakatsuka,
The 8th International Symposium on Control of Semiconductor Interfaces (ISCSI-VIII),
Sendai, Japan, Nov. 27-30, 2019.
- [Invited]
"Crystal Growth and Characterization of Group-IV Alloy Semiconductor
Heterostructures for Future Electronic Devices",
O. Nakatsuka, M. Kurosawa, S. Shibayama, and M. Sakashita, S. Zaima,
The 8th International Symposium on Control of Semiconductor Interfaces (ISCSI-VIII),
Sendai, Japan, Nov. 27-30, 2019.
2018
- [Invited]
"Heterostructure Engineering of GeSn and SiGeSn Group-IV Alloy Semiconductor Layers",
O. Nakatsuka, M. Kurosawa, W. Takeuchi, M. Sakashita, and S. Zaima,
11th International WorkShop on New Group IV Semiconductor Nanoelectronics,
Sendai, Japan, Feb. 23-24, 2018.
- "Low-Temperature Chemical Vapor Deposition of SiC Thin Film Using Vinylsilane for Metal Surface Coating", T. Doi, W. Takeuchi, Y. Jin, H. Kokubun, S. Yasuhara, O. Nakatsuka, and S. Zaima, 11th International WorkShop on New Group IV Semiconductor Nanoelectronics, Sendai, Japan, Feb. 23-24, 2018.
- "Heavily p-type Doping to Si1-xSnx Layers Grown on SOI Substrates", Y. Inaishi, M. Kurosawa, M. Sakashita, O. Nakatsuka, and S. Zaima, 10th International Symposium on Advanced Plasma Science and Its Applications for Nitrides Nanomaterials / 11th International Conference on Plasma-Nano Technology and Science (ISPlasma 2018 / IC-PLANTS 2018), Nagoya, Japan, Mar. 4-8, 2018.
- "Growth of Ge1-xSnx Layer by Metal-organic Chemical Vapor Deposition Method using Tetrakis Dimethylamino Tin",
Y. Miki, W. Takeuchi, O. Nakatsuka, and S. Zaima,
10th International Symposium on Advanced Plasma Science and Its Applications for Nitrides Nanomaterials / 11th International Conference on Plasma-Nano Technology and Science (ISPlasma 2018 / IC-PLANTS 2018),
Nagoya, Japan, Mar. 4-8, 2018.
- "Domain size effects on thermoelectric properties of p-type Ge0.95Sn0.05 layers grown on GaAs and Si substrates",
Y. Imai, K. Takahashi, N. Uchida, T. Maeda, O. Nakatsuka, S. Zaima, and M. Kurosawa,
The 2nd Electron Devices Technology and Manufacturing (EDTM 2018),
Kobe, Japan, Mar. 13-16, 2018.
- "Low thermal budget fabrication of poly-Ge1-xSnx thin film thermoelectric generator",
K. Takahashi, H. Ikenoue, M. Sakashita, O. Nakatsuka, S. Zaima, and M. Kurosawa,
The 2nd Electron Devices Technology and Manufacturing (EDTM 2018),
Kobe, Japan, Mar. 13-16, 2018.
- "Formation of Ultra-Low Resistance Contact with Nickel Stanogermanide/Heavily Doped n+-Ge1−xSnx Structure",
J. Jihee, A. Suzuki, K. Takahashi, O. Nakatsuka, and S. Zaima,
1st Joint ISTDM / ICSI 2018 Conference: 9th International SiGe Technology and Device Meeting (ISTDM)/11th International Conference on Silicon Epitaxy and Heterostructures (ICSI),
Potsdam, Germany, May 27-31, 2018.
- "Ge1−x−ySixSny/Ge1−xSnx/Ge1−x−ySixSny Double-Heterostructure with High-Si-Content Ge1−x−ySixSny Layer",
M. Fukuda, D. Rainko, M. Sakashita, M. Kurosawa, D. Buca, O. Nakatsuka, and S. Zaima,
1st Joint ISTDM / ICSI 2018 Conference: 9th International SiGe Technology and Device Meeting (ISTDM)/11th International Conference on Silicon Epitaxy and Heterostructures (ICSI),
Potsdam, Germany, May 27-31, 2018.
- "Ultra-thin GeSn on Insulator structure through the direct bonding technique",
T. Maeda, W. H. Chang, T. Irisawa, H. Ishii, H. Hattori, M. Kurosawa, Y. Imai, O. Nakatsuka, and N. Uchida,
1st Joint ISTDM / ICSI 2018 Conference: 9th International SiGe Technology and Device Meeting (ISTDM)/11th International Conference on Silicon Epitaxy and Heterostructures (ICSI),
Potsdam, Germany, May 27-31, 2018.
- [Invited]
"Engineering electronic properties of GeSn-related group-IV thin films for nanoelectronic applications",
O. Nakatsuka, M. Kurosawa, W. Takeuchi, M. Sakashita, and S. Zaima,
European Materials Research Society (E-MRS) Spring Meeting,
Strasbourg, France, June 17-22, 2018.
- [Invited]
"Engineering optoelectronic properties of high-Sn-content GeSn, GeSiSn, and SiSn thin films",
O. Nakatsuka, M. Kurosawa, M. Fukuda, M. Sakashita, W. Takeuchi, and S. Zaima,
IEEE Photonics 2018 Summer Topicals Meeting Series,
Hawaii, USA, July 9-11, 2018.
- [Invited]
"GeSn-based thin film thermoelectric generators",
M. Kurosawa, M. Sakashita, O. Nakatsuka, and S. Zaima,
International Conference on Processing & Manufactureing of Advanced Materials: Processing, Fabrication, Properties, Applications (THERMEC2018),
Paris, France, July 8-13, 2018.
- [Keynote]
"Thin film growth and characterization of group-IV alloy semiconductors for future nanoelectronic applications"
O. Nakatsuka, M. Kurosawa, and S. Zaima,
The 9th International Conference on Physics and Its Applications (ICOPIA),
Surakarta (Solo), Indonesia, Aug. 14, 2018.
- [Invited]
"Development of GeSn-related group-IV thin films for designing energy band",
O. Nakatsuka, M. Kurosawa, W. Takeuchi, M. Sakashita, and S. Zaima,
International Conference on Solid-State Devices and Materials (SSDM2018),
Tokyo, Japan, Sept. 9-13, 2018.
- "Impact of Oxygen Radical Treatment on Improvement of
Al2O3/SiC interface",
T. Doi, W. Takeuchi, M. Sakashita, N. Taoka, O. Nakatsuka, and S. Zaima,
International Conference on Solid-State Devices and Materials (SSDM2018),
Tokyo, Japan, Sept. 9-13, 2018.
- [Invited]
"A New Application of Ge1−xSnx: Thermoelectric Materials",
M. Kurosawa, Y. Imai, T. Iwahashi, K. Takahashi,
M. Sakashita, O. Nakatsuka, and S. Zaima,
Americas International Meeting on Electrochemistry and Solid State Science (AiMES 2018):
The 234th Meeting of The Electrochemical Society (ECS), the XXXIII Congreso de la Sociedad Mexicana de Electroquimica (SMEQ),
Cancun, Mexico, Sept. 30-Oci. 4, 2018.
- "Impact of Crystalline Property of
SixGe1-x-ySny Ternary Alloy Interlayer
on Schottky Barrier Height Engineering of Metal/Ge Contact",
O. Nakatsuka, A. Suzuki, M. Sakashita, and S. Zaima,
Advanced Metallization Conference 2018 (ADMETA2018): 28th Asian Session MAIP Joint Conference, Beijing, China, Oct. 10-12, 2018.
- "Thermoelectric Performance of Polycrystalline
Si1-x-yGexSny
Ternary Alloy Layer Prepared with Ion Implantation",
Y. Peng, M. Kurosawa, O. Nakatsuka, J. Gao, L. Miao, and S. Zaima,
14th International Conference on Atomically Controlled Surfaces,
Interfaces and Nanostructures (ACSIN-14),
Sendai, Japan, Oct. 21-25, 2018.
- "Formation and Optoelectronicical Characterization of Strain-relaxed
Ge1-x-ySixSny/Ge1−xSnx/
Ge1-x-ySixSny Double-heterostructure",
M. Fukuda, M. Sakashita, M. Kurosawa, O. Nakatsuka, and S. Zaima,
14th International Conference on Atomically Controlled Surfaces,
Interfaces and Nanostructures (ACSIN-14),
Sendai, Japan, Oct. 21-25, 2018.
- [Invited]
"GeSn-related group-IV semiconductor heterostructures
for electronic and optoelectronic applications",
O. Nakatsuka, M. Fukuda, M. Kurosawa, M. Sakashita, and S. Zaima,
12th International WorkShop on New Group IV Semiconductor Nanoelectronics,
Sendai, Japan, Dec. 6-7, 2018.
- "Formation of Nickel Stanogermanide/Heavily Doped
n+-Ge1−xSnx Structure with Ultra-Low Contact Resistivity",
J. Jeon, A. Suzuki, S. Shibayama, O. Nakatsuka, and S. Zaima,
12th International WorkShop on New Group IV Semiconductor Nanoelectronics,
Sendai, Japan, Dec. 6-7, 2018.
- "Study of factors to limit increasing Sn content in
Ge1-xSnx for MOCVD method",
Y. Miki, W. Takeuchi, S. Shibayama, O. Nakatsuka, and S. Zaima,
12th International WorkShop on New Group IV Semiconductor Nanoelectronics,
Sendai, Japan, Dec. 6-7, 2018.
2017
- [Invited]
"Effect of Oxynitridation Annealing for SiO2/SiC Interface on Defects Properties",
W. Takeuchi, K. Yamamoto, M. Sakashita, O. Nakatsuka, and S. Zaima,
WorkShop on New Group IV Semiconductor Nanoelectronics
and JSPS Core-to-Core Program Joint Seminar
"Atomically Controlled Processing for Ultralarge Scale Integration",
Sendai, Japan, Feb. 13-14, 2017.
- "In situ phosphorus doping of Ge and Ge1-xSnx
epitaxial layers by low-temperature metal-organic chemical vapor deposition",
S. Ike, W. Takeuchi, O. Nakatsuka, and S. Zaima,
WorkShop on New Group IV Semiconductor Nanoelectronics
and JSPS Core-to-Core Program Joint Seminar
"Atomically Controlled Processing for Ultralarge Scale Integration",
Sendai, Japan, Feb. 13-14, 2017.
- "Solid phase crystallization of Ge0.98Sn0.02 layers
on various insulating substrates",
I. Yoshikawa, M. Kurosawa, W. Takeuchi, M. Sakashita, O. Nakatsuka, and S. Zaima,
WorkShop on New Group IV Semiconductor Nanoelectronics
and JSPS Core-to-Core Program Joint Seminar
"Atomically Controlled Processing for Ultralarge Scale Integration",
Sendai, Japan, Feb. 13-14, 2017.
- "Influence of atomic layer deposition temperature of GeO2 layer
on electrical properties of Ge and Ge1-xSnx gate stack",
Y. Kaneda, M. Kanematsu, M. Sakashita, W. Takeuchi, O. Nakatsuka, and S. Zaima,
WorkShop on New Group IV Semiconductor Nanoelectronics
and JSPS Core-to-Core Program Joint Seminar
"Atomically Controlled Processing for Ultralarge Scale Integration",
Sendai, Japan, Feb. 13-14, 2017.
- "Development of in-situ Sb-Doped Ge1-xSnx Epitaxial Layers
for Source/Drain Stressor of Strained Ge Transistors",
J. Jeon, A. Suzuki, K. Takahashi, O. Nakatsuka, and S. Zaima,
The 1st Electron Devices Technology and Manufacturing Conference (EDTM),
Toyama, Japan, Feb. 28-Mar. 2, 2017.
- "Formation of SiC and SiCN films by chemical vapor deposition using vinylsilane",
T. Doi, W. Takeuchi, Y. Jin, H. Kokubun, S. Yasuhara, M. Sakashita,
M. Kuroswasa, O. Nakatsuka, and S. Zaima,
9th International Symposium on Advanced Plasma Science and
its Applications for Nitrides and Nanomaterials / 10th International Conference on
Plasma-Nano Technology & Science (ISPlasma2017/IC-PLANTS2017),
Aichi, Japan, Mar. 1-5, 2017.
- "Selective growth of Ge1-xSnx epitaxial layer
on patterned Si substrate using metal organic chemical vapor deposition method",
T. Washizu, S. Ike, W. Takeuchi, O. Nakatsuka, and S. Zaima
9th International Symposium on Advanced Plasma Science and
its Applications for Nitrides and Nanomaterials / 10th International Conference on
Plasma-Nano Technology & Science (ISPlasma2017/IC-PLANTS2017),
Aichi, Japan, Mar. 1-5, 2017.
- "Electrical Properties of AlON/4H-SiC MOS Capacitor Prepared
by Plasma-Assisted Atomic Layer Deposition",
W. Takeuchi, K. Yamamoto, T. Mimura, M. Sakashita, O. Nakatsuka, and S. Zaima,
9th International Symposium on Advanced Plasma Science and
its Applications for Nitrides and Nanomaterials / 10th International Conference on
Plasma-Nano Technology & Science (ISPlasma2017/IC-PLANTS2017),
Aichi, Japan, Mar. 1-5, 2017.
- "Epitaxial growth of n+-Ge1-xSnxlayers
with in situ phosphorus doping using low-temperature
metal-organic chemical vapor deposition method",
S. Ike, W. Takeuchi, O. Nakatsuka, and S. Zaima,
The 10th International Conference on Silicon Epitaxy and heterostructures (ICSI-10),
pp. 109-110, Coventry, UK, May 14-19, 2017.
- "Solid phase epitaxy of Si1-xSnx layers on various substrates",
M. Kurosawa, M. Kato, K. Takahashi, O. Nakatsuka, and S. Zaima,
The 10th International Conference on Silicon Epitaxy and heterostructures (ICSI-10),
pp. 123-124, Coventry, UK, May 14-19, 2017.
- "Formation of heavily Sb and Ga doped poly-Ge1-xSnx
layers on insulator using pulsed laser annealing in water",
K. Takahashi, M. Kurosawa, H. Ikenoue, M. Sakashita, O. Nakatsuka, and S. Zaima,
pp. 125-126, The 10th International Conference on Silicon Epitaxy and heterostructures (ICSI-10),
Coventry, UK, May 14-19, 2017.
- "Control of lattice constant of Ge1-x-ySixSny
layer for energy band engineering in Ge1-xSnx/
Ge1-x-ySixSny heterostructure",
M. Fukuda, K. Watanabe, M. Sakashita, M. Kurosawa, O. Nakatsuka, and S. Zaima,
The 10th International Conference on Silicon Epitaxy and heterostructures (ICSI-10),
pp. 127-128, Coventry, UK, May 14-19, 2017.
- "Alleviation of Fermi level pinning at metal/Ge interface
using lattice-matching group-IV ternary alloy interlayer",
A. Suzuki, O. Nakatsuka, S. Toda, M. Sakashita, and S. Zaima,
The 10th International Conference on Silicon Epitaxy and heterostructures (ICSI-10),
pp. 211-212, Coventry, UK, May 14-19, 2017.
- [Invited]
"Development of GeSn and related semiconductor thin films
for next generation optoelectronic applications",
O. Nakatsuka, M. Kurosawa, W. Takeuchi, M. Sakashita, and S. Zaima,
2017 Global Conference on Polymer and Composite Materials (PCM 2017),
Guangzhou, China, May 24-25, 2017.
- "Formation of Epitaxial Hf Germanide/Ge Contacts for Schottky Barrier Height Engineering",
O. Nakatsuka, A. Suzuki, J. McVittie, Y. Nishi, and S. Zaima,
17th International Workshop on Junction Technology 2017 (IWJT2017),
Kyoto, Japan, June 1-2, 2017.
- [Invited]
"Developments of GeSn-related thin-film semiconductors
for nanoelectronic and optoelectronic applications",
O. Nakatsuka, M. Kurosawa, W. Takeuchi, M. Sakashita, and S. Zaima,
Frontiers in Materials Processing Applications, Research and Technology (FiMPart),
Bordeaux, France, July 9-12, 2017.
- "Characterization of energy band structure of Si1-x-ySnxCy
ternary alloy layers prepared with solid-phase crystallization",
S. Yano, O. Nakatsuka, C. Lim, M. Sakashita, M. Kurosawa, and S. Zaima,
29th International Conference on Defects in Semiconductors (ICDS2017),
Matsue, Japan, July 31-Aug. 4, 2017.
- "Sb-doping effect on thermal and electrical properties of
Ge-rich Ge1-xSnx layers",
T. Iwahashi, M. Kurosawa, N. Uchida, Y. Ohishi, T. Maeda, O. Nakatsuka, S. Zaima,
International Conference on Solid-State Devices and Materials (SSDM2017),
Sendai, Japan, Sept. 19-22, 2017.
- "Dopants behavior in polycrystallization of heavily doped
Ge1-xSnx layer using pulsed laser annealing in water",
K. Takahashi, M. Kurosawa, H. Ikenoue, M. Sakashita, O. Nakatsuka, S. Zaima,
International Conference on Solid-State Devices and Materials (SSDM2017),
Sendai, Japan, Sept. 19-22, 2017.
- "Thermal Stability Study of in-situ Sb-Doped n-Ge1-xSnx
Epitaxial Layers for Source/Drain Stressor of Strained Ge Transistors",
J. Jeon, A. Suzuki, O. Nakatsuka, and S. Zaima,
International Conference on Materials and Systems for Sustainability 2017 (ICMaSS2017),
Nagoya, Japan, Sept. 28-Oct. 1, 2017.
- "Control of Electrical Property at Metal/Ge Interface with Group-IV Alloy Interlayer",
A. Suzuki, O. Nakatsuka, M. Sakashita, and S. Zaima,
International Conference on Materials and Systems for Sustainability 2017 (ICMaSS2017),
Nagoya, Japan, Sept. 28-Oct. 1, 2017.
- "Fabrication and Thermoelectric Mechanism Study of Flexible
Si1-xGex Superlattice Films",
Y. Peng, L. Miao, C. Li, R. Huang, D. Urushihara, T. Asaka,
M. Kurosawa, O. Nakatsuka, and S. Zaima,
International Conference on Materials and Systems for Sustainability 2017 (ICMaSS2017),
Nagoya, Japan, Sept. 28-Oct. 1, 2017.
- "Strain measurement of simulated finFET structures of Ge and GeSn prepared by MOCVD",
K. Saitoh, S. Ou, S. Ike, O. Nakatsuka, Shigeaki Zaima,
International Conference on Materials and Systems for Sustainability 2017 (ICMaSS2017),
Nagoya, Japan, Sept. 28-Oct. 1, 2017.
- "Characterization of Crystallinity and Energy Band Alignment of Ge1-xSnx/Ge1-x-ySixSny Heterostructure
M. Fukuda, M. Sakashita, M. Kurosawa, O. Nakatsuka, and S. Zaima,
International Conference on Materials and Systems for Sustainability 2017 (ICMaSS2017),
Nagoya, Japan, Sept. 28-Oct. 1, 2017.
- "Crystal Growth of Ultrathin Si and Ge Layers on Ag Surfaces",
M. Kurosawa, A. Ohta, M. Araidai, and S. Zaima,
International Conference on Materials and Systems for Sustainability 2017 (ICMaSS2017),
Nagoya, Japan, Sept. 28-Oct. 1, 2017.
- "Heavy n- and p-type doping for polycrystalline Ge1-xSnx
layers using pulsed laser annealing in water",
K. Takahashi, M. Kurosawa, H. Ikenoue, M. Sakashita, O. Nakatsuka, and S. Zaima,
International Conference on Materials and Systems for Sustainability 2017 (ICMaSS2017),
Nagoya, Japan, Sept. 28-Oct. 1, 2017.
- "Numerical calculation of energy band offset of Si1-xSnx
by density functional calculation",
Y. Nagae, M. Kurosawa, M. Araidai, O. Nakatsuka, K. Shiraishi, and S. Zaima,
International Conference on Materials and Systems for Sustainability 2017 (ICMaSS2017),
Nagoya, Japan, Sept. 28-Oct. 1, 2017.
- [Invited]
"Growth and Applications of Si1-xSnx Thin Films",
M. Kurosawa, O. Nakatsuka, and S. Zaima,
The 232nd Electron Chemical Society (ECS) Meeting,
Washington, DC, USA, Oct. 1-5, 2017.
- "Crystalline and electrical properties of epitaxial HfGe2/Ge contact
for lowering Schottky barrier height",
O. Nakatsuka, A. Suzuki, J. McVittie, Y. Nishi, and S. Zaima,
Advanced Metallization Conference 2017: 27th Asian Session (ADMETA2017),
Tokyo, Japan, Oct. 18-20, 2017.
- "Ultrathin Ge Growth on Ag Surface by Annealing of Hetero-Epitaxial Ag/Ge(111)",
A. Ohta, K. Ito, M. Kurosawa, M. Araidai, M. Ikeda, K. Makihara, and S. Miyazaki,
The 8th International Symposium on Surface Science (ISSS-8),
Tsukuba, Japan, Oct. 22-26 2017.
- [Invited]
"GeSn and related group-IV alloy thin films for future Si nanoelectronics",
O. Nakatsuka, M. Kurosawa, W. Takeuchi, M. Sakashita, and S. Zaima,
The Tenth International Conference on High-Performance Ceramics (CICC-10),
Nanchang, China, Nov. 4-7, 2017.
- "Characterization of Defects in Ge1-xSnx Gate Stack Structure",
Y. Kaneda, S. Ike, M. Kanematsu, M. Sakashita, W. Takeuchi, O. Nakatsuka, S. Zaima,
2017 International Workshop on DIELECTRIC THIN FILMS FOR FUTURE ELECTRON DEVICES: SCIENCE AND TECHNOLOGY (2017 IWDTF),
Nara, Japan, Nov. 20-22, 2017.
- "Energy Band Structure of Ga-oxide/GaN Interface Formed by Remote O2 Plasma",
T. Yamamoto, N. Taoka, A. Ohta, T. X. Nguyen, H. Yamada, T. Takahashi, M. Ikeda, K. Makihara, O. Nakatsuka, M. Shimizu, and S. Miyazaki,
2017 International Workshop on DIELECTRIC THIN FILMS FOR FUTURE ELECTRON DEVICES: SCIENCE AND TECHNOLOGY (2017 IWDTF), Nara, Japan, Nov. 20-22, 2017.
- [Keynote]
"Crystal growth of GeSn-based materials and its application for thin-film thermoelectric generators",
M. Kurosawa, M. Sakashita, O. Nakatsuka, and S. Zaima,
The 2017 Global Research Efforts on Energy and Nanomaterials (GREEN 2017),
Taipei, Taiwan, Dec. 21-24, 2017.
2016
- "Structural and Electrical Properties of Low Temperature CVD-Grown SiGe Epitaxial
Layers", S. Ike, E. Simoen, Y. Shimura, A. Hikavyy, W. Vandervorst, R.
Loo, W. Takauchi, O. Nakatsuka, and S. Zaima, 9th International
WorkShop on New Group IV Semiconductor
Nanoelectronics and JSPS Core-to-Core Program Joint Seminar "Atomically
Controlled Processing for Ultralarge Scale Integration", Sendai, Japan,
Jan. 11-12, 2016.
- "Control of Schottky barrier height at metal/Ge interface by
insertion of Ge1-xSnx
layer", A. Suzuki, O. Nakatsuka, S. Shibayama, M. Sakashita, W.
Takeuchi, M. Kurosawa, and S. Zaima, 9th International WorkShop on New
Group IV Semiconductor
Nanoelectronics and JSPS Core-to-Core Program Joint Seminar "Atomically
Controlled Processing for Ultralarge Scale Integration", Sendai, Japan,
Jan. 11-12, 2016.
- "Phosphorus doping into Ge with low electrical damage by liquid
immersion laser doping", K. Takahashi, M. Kurosawa, H. Ikenoue, M.
Sakashita, W. Takeuchi, O. Nakatsuka, and S. Zaima, 9th International
WorkShop on New Group IV Semiconductor
Nanoelectronics and JSPS Core-to-Core Program Joint Seminar "Atomically
Controlled Processing for Ultralarge Scale Integration", Sendai, Japan,
Jan. 11-12, 2016.
- "Crystalline and Electrical Properties of in-situ Sb-Doped
Ge1-xSnx Epitaxial Layers",
J. Jeon, T. Asano, Y. Shimura, W. Takeuchi, M.
Kurosawa, M. Sakashita, O. Nakatsuka, and S. Zaima, 9th International
WorkShop on New Group IV Semiconductor
Nanoelectronics and JSPS Core-to-Core Program Joint Seminar "Atomically
Controlled Processing for Ultralarge Scale Integration", Sendai, Japan,
Jan. 11-12, 2016.
- "Formation of GeSn layer sandwiched with strain-controlled GeSiSn
layers", M. Fukuda, T. Yamaha, T. Asano, S. Fujinami, Y. Shimura, M.
Kurosawa, O. Nakatsuka, and S. Zaima, 9th International WorkShop on New
Group IV Semiconductor Nanoelectronics and JSPS Core-to-Core Program
Joint Seminar "Atomically Controlled Processing for Ultralarge Scale
Integration", Sendai, Japan, Jan. 11-12, 2016.
- "Formation of poly-Si1-x-ySnxCy
ternary alloy layer and characterization of its crystalline and
optical properties", S. Yano, T. Yamaha, Y. Shimura, W. Takeuchi, M.
Sakashita, M. Kurosawa, O. Nakatsuka, and S. Zaima, 9th International
WorkShop on New Group IV Semiconductor
Nanoelectronics and JSPS Core-to-Core Program Joint Seminar "Atomically
Controlled Processing for Ultralarge Scale Integration", Sendai, Japan,
Jan. 11-12, 2016.
- "Impact of Atomic Hydrogen Irradiation on Epitaxial Growth of Ge1-xSnx
and its Crystalline Property", S. Fujinami, T. Asano, T. Koyama, M.
Kurosawa, M. Sakashita, O. Nakatsuka, H. Kishida, and S. Zaima, 8th
International
Symposium on Advanced Plasma Science and its Applications for Nitrides
and Nanomaterials / 9th International Conference on Plasma-Nano
Technology & Science (ISPlasma2016/IC-PLANTS2016), Nagoya, Japan,
Mar. 6-10, 2016.
- "Solid phase crystallization of Si1-x-ySnxCy
ternary alloy layers and characteriziation of its crystalline and
optical properties", S. Yano, T. Yamaha, Y. Shimura, W. Takeuchi, M.
Sakashita, M. Kurosawa, O. Nakatsuka, and S. Zaima, 8th International
Symposium on Advanced Plasma Science and its
Applications for Nitrides and Nanomaterials / 9th International
Conference on Plasma-Nano Technology & Science
(ISPlasma2016/IC-PLANTS2016), Nagoya, Japan, Mar. 6-10, 2016.
- "International collaboration: the path to breakthroughs in (Si)GeSn material
development", R. Loo, M. Caymax, A. Vantomme, O. Nakatsuka, and S.
Zaima,12th International Nanotechnology Conference on Communication ans Cooperation (INC12), Leuven, Belgium, May 10-12, 2016.
- [Invited]"Development of GeSn thin film technology for electronic and
optoelectronic applications", O. Nakatsuka, M. Kurosawa, W. Takeuchi,
Y. Shimura, M. Sakashita, and S. Zaima, Energy Materials Nanotechnology (EMN) Summer Meeting, Cancun, Mexico, June 5-9, 2016.
- "Control of the Fermi Level Pinning Position at Metal/Ge Interface by Using Ge1-xSnx Interlayer",
A. Suzuki, O. Nakatsuka, M. Sakashita, and S. Zaima, 7th International
Symposium on Control of Semiconductor Interface (ISCSI-VII) /
International SiGe Technology and Device Meeting 2016 (ISTDM2016),
Nagoya, Japan, June 7-11, 2016.
- "Interfacial Energy Control for Low-Temperature Crystallization
of Ge-rich GeSn Layers on Insulating Substrate", I. Yoshikawa, M.
Kurosawa, W. Takeuchi, M. Sakashita, O. Nakatsuka, and S. Zaima, 7th
International Symposium on Control of Semiconductor Interface
(ISCSI-VII) / International SiGe Technology and Device Meeting 2016
(ISTDM2016), Nagoya, Japan, June 7-11, 2016.
- "Formation and Characterization of GeSiSn/GeSn/GeSiSn
Double-Heterostructure with Strain-controlled GeSiSn layer", M. Fukuda,
T. Yamaha, T. Asano, S. Fujinami, Y. Shimura, M. Kurosawa, O.
Nakatsuka, and S. Zaima, 7th International Symposium on Control of Semiconductor Interface
(ISCSI-VII) / International SiGe Technology and Device Meeting 2016
(ISTDM2016), Nagoya, Japan, June 7-11, 2016.
- "Effect of Local and Global Strain on Thermal Stability of Sn in
GeSn Based Film", Y. Shimura, T. Asano, T. Yamaha, O. Nakatsuka, and S.
Zaima, 7th International Symposium on Control of Semiconductor Interface
(ISCSI-VII) / International SiGe Technology and Device Meeting 2016
(ISTDM2016), Nagoya, Japan, June 7-11, 2016.
- "Electrical and Optical Properties Improvement of GeSn Layers Formed at High
Temperature under Well-controlled Sn Migration", N. Taoka, G.
Capellini, V. Schlykow, M. Montanari, P. Zaumseil, O. Nakatsuka, S.
Zaima, and T. Schroeder, 7th International Symposium on Control of
Semiconductor Interface
(ISCSI-VII) / International SiGe Technology and Device Meeting 2016
(ISTDM2016), Nagoya, Japan, June 7-11, 2016.
- "Direct Measurement of Anisotropic Local Strain in Ge Nanostructures Strained with MOCVD-grown Ge1-xSnx
by using Microdiffraction", S. Ike, Y. Inuzuka, T. Washizu, W.
Takeuchi, Y. Shimura, Y. Imai, O. Nakatsuka, S. Kimura, and S. Zaima,
7th International Symposium on Control of Semiconductor Interface
(ISCSI-VII) / International SiGe Technology and Device Meeting 2016
(ISTDM2016), Nagoya, Japan, June 7-11, 2016.
- "Si1-xGex
Bulk Single Crystals for Substrates of Electronic Devices", K.
Kinoshita, Y. Arai, T. Maeda, and O. Nakatsuka, 7th International
Symposium on Control of Semiconductor Interface
(ISCSI-VII) / International SiGe Technology and Device Meeting 2016
(ISTDM2016), Nagoya, Japan, June 7-11, 2016.
- [Invited] "Growth and applications of
GeSn-related group-IV semiconductor materials",
S. Zaima, O. Nakatsuka, T. Asano, T. Yamaha, S. Ike, A. Suzuki, K.
Takahashi, Y. Nagae, M. Kurosawa, W. Takeuchi, Y. Shimura, and M.
Sakashita, IEEE Summer Topicals Meeting, Newport Beach, USA, July
11-13, 2016.
- "Low-Temperature Selective Epitaxial Growth of Ge on Si
by using Metal Organic Chemical Vapor Deposition",
T. Washizu, S. Ike, Y. Inuzuka, W. Takeuchi, O. Nakatsuka, S. Zaima,
The 18th International Conference on Crystal Growth and Epitaxy (ICCGE18),
Nagoya, Japan, Aug. 7-12, 2016.
- [Invited]
"Challenges in Engineering Materials Properties for GeSn Nanoelectronics",
S. Zaima, O. Nakatsuka, M. Kurosawa, W. Takeuchi, and M. Sakashita,
European Materials Research Society (E-MRS) 2016 Fall Meeting, Warsaw, Poland, Sept. 19-22, 2016.
- "Growth of Heavily Doped n-Ge Epitaxial Layer by In situ
Phosphorus-doping with Low-temperature Metal-Organic Chemical Vapor Deposition"
S. Ike, W. Takeuchi, O. Nakatsuka, and S. Zaima,
International Conference on Solid State Devices and Materials (SSDM2016),
Tsukuba, Japan, Sept. 26-29, 2016.
- "Impact of SixGe1-x-ySny interlayer
on reduction in Schottky barrier height of metal/n-Ge contact"
A. Suzuki, S. Toda, O. Nakatsuka, M. Sakashita, and S. Zaima,
International Conference on Solid State Devices and Materials (SSDM2016),
Tsukuba, Japan, Sept. 26-29, 2016.
- "Heavy Sb-doping for poly-GeSn on insulator using pulsed laser annealing in water",
K. Takahashi, M. Kurosawa, H. Ikenoue, M. Sakashita, O. Nakatsuka, and S. Zaima,
International Conference on Solid State Devices and Materials (SSDM2016),
Tsukuba, Japan, Sept. 26-29, 2016.
- "Investigation of effects of inner stress with Sn incorporation
on energy band of Si1-xSnx using
density functional theory and photoelectron spectroscopy",
Y. Nagae, M. Kurosawa, M. Araidai, O. Nakatsuka, K. Shiraishi, and S. Zaima,
International Conference on Solid State Devices and Materials (SSDM2016),
Tsukuba, Japan, Sept. 26-29, 2016.
- "Effect of N bonding structure in AlON on leakage current
of 4H-SiC MOS capacitor",
W. Takeuchi, K. Yamamoto, T. Mimura, M. Sakashita, T. Kanemura, O. Nakatsuka, and S. Zaima,
International Conference on Solid State Devices and Materials (SSDM2016),
Tsukuba, Japan, Sept. 26-29, 2016.
- "Analysis of Microscopic Strain and Crystalline Structure in
Ge/Ge1-xSnx Fine Structures by Using Synchrotron X-ray Microdiffraction",
S. Ike, O. Nakatsuka, Y. Inuzuka, T. Washizu, W. Takeuchi, Y. Imai, S. Kimura, and S. Zaima,
230th Meeting of the Electrochmical Society / Pacific Rim Meeting (PRiME) 2016,
Honolulu, USA, Oct. 2-7, 2016.
- "Thermoelectric Properties of Ge-Rich GeSn Films Grown on Insulators",
M. Kurosawa, K. Liu, M. Izawa, I. Tsunoda, and S. Zaima,
230th Meeting of the Electrochmical Society / Pacific Rim Meeting (PRiME) 2016,
Honolulu, USA, Oct. 2-7, 2016.
- "Microwave Annealing for Low-Thermal Budget Process of
Nickel Monogermanide/Germanium Contact Formation ",
O. Nakatsuka, Y. Watanabe, A. Suzuki, Y. Nishi, and S. Zaima,
Advanced Metallization Conference 2016: 26th Asian Session, Oct. 20-21, 2016, Tokyo, Japan.
- "Characterization of Deep-Level Defects in Ge1-xSnx Epitaxial Layers using Deep
Level Transient Spectroscopy",
W. Takeuchi, Y. Inuzuka, N. Taoka, M. Sakashita, O. Nakatsuka, S. Zaima,
The 7th International Symposium on Advanced Science and Technology of Silicon Materials,
Hawaii, USA, Nov. 21-25, 2016./li>
- "Growth of Si1-xSnx heteroepitaxial layers with very high Sn contents on InP(001) substrates",
M. Kurosawa, M. Kato, O. Nakatsuka, and S. Zaima,
JSPS Workshop on "Atomically Controlled Processing for Ultra-large Scale Integration",
Julich, Germany, Nov. 24-25, 2016.
- "Control of Schottky barrier height of metal/Ge contact using group-IV alloy interlayers",
A. Suzuki, O. Nakatsuka, S. Toda, M. Sakashita, and S. Zaima,
JSPS Workshop on "Atomically Controlled Processing for Ultra-large Scale Integration",
Julich, Germany, Nov. 24-25, 2016.
- "Formation of heavily Sb doped poly-Ge1-xSnx
layer using pulsed laser annealing in water",
K. Takahashi, M. Kurosawa, H. Ikenoue, M. Sakashita, O. Nakatsuka, and S. Zaima,
JSPS Workshop on "Atomically Controlled Processing for Ultra-large Scale Integration",
Julich, Germany, Nov. 24-25, 2016.
2015
- "Crystal growth of Si1-xSnx alloys with
high Sn contents", M. Kurosawa, M. Kato, Y. Nagae, T. Yamaha, O.
Nakatsuka, and S. Zaima, 8th International WorkShop on New Group IV
Semiconductor Nanoelectronics and JSPS Core-to-Core Program Joint
Seminar "Atomically Controlled Processing for Ultralarge Scale
Integration", Sendai, Japan, Jan. 29-30, 2015.
- [Invited] "Behaviors of
tin
related defects in Sb doped n-type germanium", W. Takeuchi, N. Taoka,
M. Sakashita, O. Nakatsuka, and S. Zaima, 8th International WorkShop on
New Group IV Semiconductor
Nanoelectronics and JSPS Core-to-Core Program Joint Seminar "Atomically
Controlled Processing for Ultralarge Scale Integration", Sendai, Japan,
Jan. 29-30, 2015.
- "Photoluminescence Property of Ge1-xSnx
Epitaxial Layers Grown on Ge(001) substrates", T. Asano, K. Hozaki, T.
Koyama, N. Taoka, O. Nakatsuka, H. Kishida, and S. Zaima, 8th
International WorkShop on New Group IV Semiconductor
Nanoelectronics and JSPS Core-to-Core Program Joint Seminar "Atomically
Controlled Processing for Ultralarge Scale Integration", Sendai, Japan,
Jan. 29-30, 2015.
- "Crystalline and Optical Properties of Ge1-x-ySixSny
Ternary Alloy Layers for Solar Cell Application", T. Yamaha, S. Asaba,
T. Terashima, T. Asano, W. Takeuchi, M. Sakashita, N.Taoka, O.
Nakatsuka, and S. Zaima, 8th International WorkShop on New Group IV
Semiconductor
Nanoelectronics and JSPS Core-to-Core Program Joint Seminar "Atomically
Controlled Processing for Ultralarge Scale Integration", Sendai, Japan,
Jan. 29-30, 2015.
- "Epitaxial Growth of Ge1-xSnx Thin Films by
using Metal-Organic Chemical Vapor Deposition", Y. Inuzuka, S. Ike, T.
Asano, W. Takeuchi, O. Nakatsuka, and S. Zaima, 8th International
WorkShop on New Group IV Semiconductor
Nanoelectronics and JSPS Core-to-Core Program Joint Seminar "Atomically
Controlled Processing for Ultralarge Scale Integration", Sendai, Japan,
Jan. 29-30, 2015.
- "Formation of strain-free Si1-x-yGexSny
layers on Ge surfaces by using solid-liquid coexisting annealing", M.
Kato, M. Kurosawa, T. Yamaha, N. Taoka, O. Nakatsuka, and S. Zaima, 8th
International WorkShop on New Group IV Semiconductor
Nanoelectronics and JSPS Core-to-Core Program Joint Seminar "Atomically
Controlled Processing for Ultralarge Scale Integration", Sendai, Japan,
Jan. 29-30, 2015.
- "Electrically-Active Defects in Ge1-xSnx
Epitaxtial Layer", W. Takuechi, T. Asano, M. Sakashita, O. Nakatsuka,
and S. Zaima, 7th International Symposium on Advanced Plasma Science
and its
Applications for Nitrides and Nanomaterials / 8th International
Conference on Plasma-Nano Technology (ISPlasma2015 / ICPLANTS2015),
Nagoya, Japan, March 26-31, 2015.
- "Solid Phase Epitaxy of Ge1-x-ySnxCy
Ternary Alloy Layers", H. Oda, T. Yamaha, M. Kurosawa, W. Takeuchi, M.
Sakashita, O. Nakatsuka, S. Zaima, 7th International Symposium on
Advanced Plasma Science and
its Applications for Nitrides and Nanomaterials / 8th International
Conference on Plasma-Nano Technology (ISPlasma2015 / ICPLANTS2015),
Nagoya, Japan, March 26-31, 2015.
- "Formation of type‐I energy band alignment of Ge1-x-ySixSny/Ge
hetero structure", T. Yamaha, K. Kato, S. Shibayama, T. Asano, M.
Sakashita, O. Nakatsuka, and S. Zaima, The 9th International Conference
on Silicon Epitaxy and Heterostructures (ICSI 9), Montreal, Canada, May
17-22, 2015.
- "Solid Phase Epitaxy of High Sn Content Si1-xSnx
layer (x>0.2) on Ge Substrates for Optical Communication
Applications", M. Kato, M. Kurosawa, T. Yamaha, N. Taoka, O. Nakatsuka,
and S. Zaima, The 9th International Conference on Silicon Epitaxy and
Heterostructures (ICSI 9), Montreal, Canada, May 17-22, 2015.
- "Control of Electrically Active Defects in Ge1-xSnx
Epitaxial Layers", T. Asano, S. Shibayama, W. Takeuchi, M. Sakashita,
O.Nakatsuka, S. Zaima, The 9th International Conference on Silicon
Epitaxy and Heterostructures (ICSI 9), Montreal, Canada, May 17-22,
2015.
- "Characterization of Crystallinity of Ge1-xSnx
Epitaxial Layers Grown by using Metal-Organic Chemical Vapor
Deposition", Y. Inuzuka, S. Ike, T. Asano, W. Takeuchi, O. Nakatsuka,
and S. Zaima, The 9th International Conference on Silicon Epitaxy and
Heterostructures (ICSI 9), Montreal, Canada, May 17-22, 2015.
- "Thermophysical characterizations of Ge1-xSnx
epitaxial layers aiming for thermoelectric devices", M. Kurosawa, M.
Fukuda, K. Takahashi, M. Sakashita, O. Nakatsuka, and S. Zaima, The 9th
International Conference on Silicon Epitaxy and Heterostructures (ICSI
9), Montreal, Canada, May 17-22, 2015.
- "Formation of Ge pn-junction diode by phosphorus doping with
liquid immersion laser irradiation", K. Takahashi, M. Kurosawa, H.
Ikenoue, M. Sakashita, W. Takeuchi, O. Nakatsuka, and S. Zaima, 15th
International Workshop on Junction Technology 2015 (IWJT2015), Kyoto,
Japan, June 11-12, 2015.
- [Invited] "Development of
polycrystalline Sn-related group-IV semiconductor thin
films --Aiming for 3D-IC--", M. Kurosawa, W. Takeuchi, S. Sakashita, O.
Nakatsuka, and S. Zaima, 2015 Asia-Pacific Workshop on Fundamentals and
Applications of Advanced Semiconductor Devices (AWAD 2015), Jeju,
Korea, June 29-July 1, 2015.
- [Invited] "Characterization of deep-level defects in epitaxial Ge1-xSnx/Ge
structure", W. Takeuchi, Y. Inuzuka, T. Asano, M. Sakashita, O.
Nakatsuka, and S. Zaima,
JSPS International Workshop Core-to-Core Program Atomically Controlled
Processing for Ultra-large Scale Integration, Marseille, France, July
9-10, 2015.
- "Reduction of Schottky barrier height with Sn/Ge contact", A.
Suzuki, O. Nakatsuka, S. Shibayama, M. Sakashita, W. Takeuchi, M.
Kurosawa, and S. Zaima, JSPS International Workshop Core-to-Core
Program Atomically Controlled Processing for Ultra-large Scale
Integration, Marseille, France, July 9-10, 2015.
- "Crystalline
Structure and Chemical Reaction of Ti Thin Layer on Highly Oriented
Pyrolytic Graphite", O. Nakatsuka, K. Hisada, S. Oida, A. Sakai, and S.
Zaima, Advanced Metallization Conference 2015 (ADMETAplus): 25th Asian
Session, Seoul, Korea, Sept. 16-18, 2015.
- "Influence of in-situ Sb-Doping on
Crystalline and Electrical Characteristics of n-type Ge1-xSnx
Epitaxial Layer", J. Jeon, T. Asano, W. Takeuchi, M. Kurosawa, O.
Nakatsuka, and S. Zaima, International
Conference on Solid State
Devices and Materials (SSDM2015), Sapporo, Japan,
Sept. 27-30,
2015.
- "Impact of ultra-high Sn content SnxGe1
-x
interlayeron reducing Schottky barrier height at metal/n-Ge interface",
A. Suzuki, O. Nakatsuka, S. Shibayama, M. Sakashita, W. Takeuchi, M.
Kurosawa, and
S. Zaima, International
Conference on Solid State
Devices and Materials (SSDM2015), Sapporo, Japan,
Sept. 27-30,
2015.
- [Invited] "Crystal Growth of GeSn-related Group-IV Thin Films for
Integrating on Si Nanoelectronics Platform", S. Zaima, O.
Nakatsuka, T. Asano, T. Yamaha, S. Ike, A. Suzuki, M. Kurosawa, W.
Takeuchi, and M. Sakashita, International
Conference on Solid State
Devices and Materials (SSDM2015), Sapporo, Japan,
Sept. 27-30,
2015.
- "Influence of Precursor Gas on SiGe Epitaxial Material Quality in
Terms of Structural and Electrical Defects",
S. Ike, E. Simoen, Y. Shimura, A. Hikavyy, W. Vandervorst, R. Loo, O.
Nakatsuka, and S. Zaima, International
Conference on Solid State
Devices and Materials (SSDM2015), Sapporo, Japan,
Sept. 27-30,
2015.
- "Effect of Nitridation for SiO2/SiC Interface on
Defects Properties near Conduction Band Edge", W. Takeuchi, K.
Yamamoto, M. Sakashita, T. Kanemura, O. Nakatsuka, and S. Zaima,
International
Conference on Solid State
Devices and Materials (SSDM2015), Sapporo, Japan,
Sept. 27-30,
2015.
- [Invited]
"Challenges of Energy Band Engineering with New Sn-Related Group IV
Semiconductor Materials for Future Integrated Circuits",
S. Zaima, O. Nakatsuka, T. Yamaha, T. Asano, S. Ike, A. Suzuki, M.
Kurosawa, W. Takeuchi, and M. Sakashita, The 228th Electrochemical
Society Meeting, Phoenix, USA, Oct. 11-16, 2015.
- "Influence of Atomic Layer Deposition
Temperature of GeO2
Layer on Electrical Properties of Ge Gate Stack", M. Kanematsu,
S. Shibayama, M. Sakashita, W. Takeuchi, O. Nakatsuka, and S. Zaima,
2015 International Workshop on DIELECTRIC THIN FILMS FOR FUTURE
ELECTRON DEVICES - SCIENCE AND TECHNOLOGY - (IWDTF2015), Tokyo, Japan,
Nov. 2-4, 2015.
- "Evaluation of Energy Band Structure of Si1-xSnx
by Density Functional Theory Calculation and Photoelectron
Spectroscopy", Y. Nagae, S. Shibayama, M. Kurosawa, M. Araidai, M.
Sakashita, O. Nakatsuka, K. Shiraishi, and S. Zaima, 2015 International Workshop on DIELECTRIC THIN
FILMS FOR FUTURE ELECTRON DEVICES - SCIENCE AND TECHNOLOGY -
(IWDTF2015), Tokyo, Japan, Nov. 2-4, 2015.
- "Recent Progress of Silicon Tin Alloys for
Advanced Semiconductor Devices", M. Kurosawa, O. Nakatsuka, and S.
Zaima, The first International Workshop on Advanced Nanomaterials for
Future Electron Devices 2015 (IWAN2015), Nagoya, Japan, Nov. 7-8, 2015.
- "Crystal Growth and Energy Band Engineering
of Group-IV Semiconductor Thin Films for Nanoelectronic Applications",
O. Nakatsuka, M. Kurosawa, W. Takeuchi, Y. Shimura, M. Sakashita, and
S. Zaima, The first International Workshop on Advanced Nanomaterials
for Future Electron Devices 2015 (IWAN2015), Nagoya, Japan, Nov. 7-8,
2015.
- "Electrical characteristics of Ge
pn-junction diodes prepared by using liquid immersion laser doping", K.
Takahashi, M. Kurosawa, H. Ikenoue, M. Sakashita, W. Takeuchi, O.
Nakatsuka, and S. Zaima, International Symposium on EcoTopia Science
2015 (ISETS '15), Nagoya, Japan, Nov. 27-29, 2015.
- "Control of Schottky Barrier Height at
Metal/Ge Interface by SnxGe1-x Interlayer", A.
Suzuki,
O. Nakatsuka, S. Shibayama, M. Sakashita, W. Takeuchi, M. Kurosawa, and
S. Zaima, International Symposium on EcoTopia Science 2015 (ISETS '15),
Nagoya, Japan, Nov. 27-29, 2015.
- "Characterization of Electrically Active
Defects in Epitaxial GeSn/n-Ge Junctions", W. Takeuchi,
T. Asano, Y. Inuzuka, M. Sakashita, O.Nakatsuka, and S. Zaima,
International Symposium on EcoTopia Science 2015 (ISETS '15), Nagoya,
Japan, Nov. 27-29, 2015.
- "Calculation of Si1-xSnx
Energy Band Structures by using Density Functional Theory Considering
Atomic Configuration", Y. Nagae,
M. Kurosawa, S. Shibayama, O. Nakatsuka, S. Zaima, International
Symposium on EcoTopia Science 2015 (ISETS '15), Nagoya, Japan, Nov.
27-29, 2015.
- "Silicon-Tin Semiconductors for
Near-Infrared Optoelectronic Device Applications", M. Kurosawa,
M. Kato, O. Nakatsuka, and S. Zaima, International Symposium on
EcoTopia Science 2015 (ISETS '15), Nagoya, Japan, Nov. 27-29, 2015.
- "X-ray Microdiffraction Characterization of
Local Strain Distribution in GeSn/Ge Nanostructures", S. Ike, O. Nakatsuka, Y.
Moriyama, M. Kurosawa, N. Taoka, Y. Imai, S. Kimura, T. Tezuka, and S.
Zaima,
International Symposium on EcoTopia Science 2015 (ISETS '15), Nagoya,
Japan, Nov. 27-29, 2015.
- "Schottky Barrier Engineering by Epitaxial
Metal Germanide / Germanium Contacts", O. Nakatsuka,
Y. Deng, A. Suzuki, M. Sakashita, and S. Zaima, International Symposium
on EcoTopia Science 2015 (ISETS '15), Nagoya, Japan, Nov. 27-29, 2015.
- "Si and Ge Ultrathin Films by Ag-Induced
Layer-Exchange Growth", M. Kurosawa, A. Ohta, M. Araidai, and S. Zaima,
23rd International Colloquium on Scanning Probe Microscopy (ICSPM23),
Niseko, Japan, Dec. 10-12, 2015.
2014
- "Formation and Electrical Property of Epitaxial
NiGe/Ge(110) Schottky Contacts", Y.S. Deng, O. Nakatsuka, N. Taoka, and
Shigeaki Zaima, 7th International WorkShop on New Group IV
Semiconductor Nanoelectronics and JSPS Core-to-Core Program Joint
Seminar "Atomically Controlled Processing for Ultralarge Scale
Integration", Sendai, Japan, Jan. 27-28, 2014.
- "Characterization of Crystalline Structures of SiGe Substrate
Formed by Traveling Liquidus-Zone Method and Fabrication of Strained Ge
Layer", T. Yamaha, O. Nakatsuka, N. Taoka, K. Kinoshita, S. Yoda, and
S. Zaima, 7th International WorkShop on New Group IV Semiconductor
Nanoelectronics and JSPS Core-to-Core Program Joint Seminar" Atomically
Controlled Processing for Ultralarge Scale Integration", Sendai, Japan,
Jan. 27-28, 2014.
- "Substrate Orientation Dependence of Crystalline Structures of
Epitaxial GeSn Layers", T. Asano, S. Kidowaki, M. Kurosawa, N. Taoka,
O. Nakatsuka, and S. Zaima, 7th International WorkShop on New Group IV
Semiconductor Nanoelectronics and JSPS Core-to-Core Program Joint
Seminar" Atomically Controlled Processing for Ultralarge Scale
Integration", Sendai, Japan, Jan. 27-28, 2014.
- "Sn-assisted low temperature crystallization of polycrystalline
Ge1-xSnx thin-films on insulating surfaces", M.
Kurosawa, T. Yamaha, W.
Takeuchi, N. Taoka, O. Nakatsuka, H. Ikenoue, and S. Zaima, 7th
International WorkShop on New Group IV Semiconductor Nanoelectronics
and JSPS Core-to-Core Program Joint Seminar" Atomically Controlled
Processing for Ultralarge Scale Integration", Sendai, Japan, Jan.
27-28, 2014.
- "Strain Distributions at Edge of Corner in Bonded Si in
Chip-On-Wafer Structures", N. Taoka, O. Nakatsuka, Y. Mizushima, H.
Kitada, Y. S. Kim, T. Nakamura, T. Ohbac, and S. Zaima, Materials for
Advanced Metallization Conference 2014, Chemnitz, Germany, March 2-5,
2014.
- "Formation and Electrical Properties of Metal/Ge1-xSnx
Contacts",
O. Nakatsuka, A. Suzuki, K. Kato, Y. S. Deng, M. Kurosawa, W. Takeuchi,
M. Sakashita, N. Taoka, and S. Zaima, 14th International Workshop on
Junction Technology (IWJT 2014), Shanghai, China, May 18-20, 2014.
- "Low temperature growth of SiSn polycrystals with high Sn
contents on insulating layers", M. Kurosawa, M. Kato, T. Yamaha, N.
Taoka, O. Nakatsuka, and S. Zaima, 7th International SiGe Technology
and Device Meeting (ISTDM2014), Singapore, June 1-4, 2014.
- "Impact of crystalline structure on electrical property of
NiGe/Ge contact", D. Yunsheng, O. Nakatsuka, N. Taoka, and S. Zaima,
7th International SiGe Technology and Device Meeting (ISTDM2014),
Singapore, June 1-4, 2014.
- "Growth and crystalline properties of Ge1-x-ySnxCy
ternary alloy
thin films on Ge(001) substrate", K. Terasawa, T. Yamaha, M. Kurosawa,
W. Takeuchi, N. Taoka, O. Nakatsuka, E. Kamiyama, R. Matsutani, R.
Suwa, K. Kashima, K. Izunome, K. Sueoka, and S. Zaima, 7th
International SiGe Technology and Device Meeting (ISTDM2014),
Singapore, June 1-4, 2014.
- [Invited] "Crystal growth
of Sn-related group-IV alloy thin films for advanced silicon
nanoelectronics", S. Zaima, O. Nakatsuka, N. Taoka, M. Kurosawa, T.
Asano, T. Yamaha, and W. Takauchi, 7th International SiGe Technology
and Device Meeting (ISTDM2014), Singapore, June 1-4, 2014.
- "Epitaxial growth and crystalline properties of Ge1-x-ySixSny
Layers on Ge(001) Substrates", T. Asano, T. Terashima, T. Yamaha, M.
Kurosawa, W. Takeuchi, N. Taoka, O. Nakatsuka, and S. Zaima, 7th
International SiGe Technology and Device Meeting (ISTDM2014),
Singapore, June 1-4, 2014.
- "Impact of Sn incorporation on low temperature growth of
polycrystalline-Si1-xGex layers on Insulators",
T. Yamaha, T. Ohmura,
M. Kurosawa, W. Takeuchi, N. Taoka, O. Nakatsuka, and S. Zaima, 7th
International SiGe Technology and Device Meeting (ISTDM2014),
Singapore, June 1-4, 2014.
- "Crystalline Growth and Characterization of Group-IV Ternary
Alloy Thin Films for Solar Cell", T. Yamaha, K. Terasawa, T. Terashima,
W. Takeuchi, M. Sakashita, N. Taoka, O. Nakatsuka, and S. Zaima, Grand
Renewable Energy 2014 International Conference and Exhibition, Tokyo,
Japan, July 27-Aug. 1, 2014.
- "Mobility behavior of Si1-x-yGexSny
polycrystals grown on insulators", T. Ohmura, T. Yamaha, M. Kurosawa,
W. Takeuchi, M. Sakashita, N. Taoka, O. Nakatsuka, and S. Zaima, The
15th IUMRS-International Conference in Asia (IUMRS-ICA 2014), Fukuoka,
Japan, Aug. 24-30, 2014.
- "Transformation of Defects Structure in Germanium by Sn Ion
Implantation", W. Takeuchi, N.
Taoka, M. Sakashita, O. Nakatsuka, and S. Zaima, The 15th
IUMRS-International
Conference in Asia (IUMRS-ICA 2014), Fukuoka, Japan, Aug. 24-30, 2014.
- "Electrically Active Defects in
GeSnSi/Ge
Junctions Formed at Low Temperature", N. Taoka, T. Asano, T. Yamaha, T.
Terashima, S. Asaba, O. Nakatsuka, P. Zaumseil, G. Capellini, T.
Schroeder, and S. Zaima, International
Conference on Solid State
Devices and Materials (SSDM2014), pp. 8-9,
Tsukuba, Japan, Sept. 8-11, 2014.
- "Formation and Energy Band Engineering of Ternary Alloy Ge1-x-ySnxCy
Layers", T. Yamaha, H. Oda, M.
Kurosawa, W. Takeuchi, N. Taoka, O. Nakatsuka, and
S. Zaima, International
Conference on Solid State
Devices and Materials (SSDM2014), pp. 552-553,
Tsukuba, Japan, Sept. 8-11, 2014.
- "Impact of Hydrogen Surfactant
Epitaxy and Annealing on Crystallinity of Epitaxial Ge1-xSnx
Layers", T. Asano, N. Taoka, K. Hozaki, W. Takeuchi, M. Sakashita, O.
Nakatsuka, and
S. Zaima, International
Conference on Solid State
Devices and Materials (SSDM2014), pp. 554-555,
Tsukuba, Japan, Sept. 8-11, 2014.
- "Operations of CMOS Inverter and
Ring Oscillator Composed of Ultra-Thin Body Poly-Ge p- and
n-MISFETs for Stacked Channel 3D-IC ", Y. Kamata, M. Koike, E.
Kurosawa, M. Kurosawa, H. Ota, O. Nakatsuka, S. Zaima, and T. Tezuka,
International
Conference on Solid State
Devices and Materials (SSDM2014), pp. 668-669,
Tsukuba, Japan, Sept. 8-11, 2014.
- "Sub-300oC fabrication of
poly-GeSn junctionless tri-gate p-FETs enabling sequential 3D
integration of CMOS circuits", M. Kurosawa, Y. Kamata, H. Ikenoue, N.
Taoka, O. Nakatsuka, T. Tezuka, and S. Zaima, International
Conference on Solid State
Devices and Materials (SSDM2014), pp. 684-685,
Tsukuba, Japan, Sept. 8-11, 2014.
- [Invited] "Challenges and
Developments in GeSn Process Technology for Si Nanoelectronics", S.
Zaima, O. Nakatsuka, N. Taoka, K. Kato, W. Takeuchi, and M. Sakashita, 2014 ECS and SMEQ Joint International Meeting, Cancun,
Mexcio, Oct. 5-9, 2014.
- [Invited] "Epitaxial
Growth of GeSn Layers on (001), (110), and (111) Si and Ge Substrates",
O. Nakatsuka, N. Taoka, T. Asano, T. Yamaha, M. Kurosawa, W. Takeuchi,
and S. Zaima, 2014 ECS and SMEQ Joint International Meeting, Cancun,
Mexcio, Oct. 5-9, 2014.
- "Poly & Epitaxial Crystallization of
Silicon-Tin Binary Alloys for Future Optoelectronics", M. Kurosawa, M.
Kato, K. Takahashi, T. Yamaha, N. Taoka, O. Nakatsuka, and S. Zaima,
International Conference on Thin Films 2014 (ICTF2014), Dubrovnik, Croatia, Oct.
13-16, 2014.
- "Formation of Epitaxial NiGe Layer on
Ge(001) Substrate and Influence of Interface Structure on Schottky
Barrier Height", O. Nakatsuka, Y. Deng, M. Sakashita, and S. Zaima, Advanced Metallization Conference 2014: 24th Asian
Session IWAPS Joint Conference, Tokyo, Japan, Oct. 22-24, 2014.
- "Low Schottky barrier height contacts with
Sn electrode for various orientation n-Ge substrates", A. Suzuki, Y.
Deng, S. Shibayama, M. Kurosawa, M. Sakashita, O. Nakatsuka, and S.
Zaima, Advanced Metallization Conference 2014: 24th Asian Session IWAPS
Joint Conference, Tokyo, Japan, Oct.
22-24, 2014.
- "Development of metal/Ge contacts for
engineering Schottky barriers", O. Nakatsuka, Y. Deng, A. Suzuki, S.
Shibayama, M. Kurosawa, W. Takeuchi, M. Sakashita, N. Taoka, and S.
Zaima, Workshop on "Atomically Controlled Processing for Ultra-large
Scale Integration", Leuven, Belgium, Nov. 13-14, 2014.
- "Study of Local Strain Distribution in Ge1
-xSnx/Ge Fine Structures by using Synchrotron Xray
Microdiffraction", S. Ike, Y. Moriyama,
M.Kurosawa,
N. Taoka, O. Nakatsuka, Y. Imai, S. Kimura, T. Tezuka, and S. Zaima, Workshop on "Atomically Controlled Processing for
Ultra-large Scale Integration", Leuven, Belgium, Nov. 13-14, 2014.
- "Growth and Characterization of Ternary
Alloy Ge1-x-ySnxCy Layers", T. Yamaha,
H. Oda, M. Kurosawa, W. Takeuchi, N. Taoka, O. Nakatsuka, and S. Zaima,
Workshop on "Atomically Controlled
Processing for Ultra-large Scale Integration", Leuven, Belgium, Nov.
13-14, 2014.
- "Hydrogen Surfactant Epitaxy of Ge1-xSnx
Layers", T. Asano, N. Taoka, K. Hozaki, W. Takeuchi, M. Sakashita, O.
Nakatsuka, and S. Zaima, Workshop on "Atomically Controlled Processing for
Ultra-large Scale Integration", Leuven, Belgium, Nov. 13-14, 2014.
- "Interplay between metallization and strain
relaxation in epitaxial GeSn layers", A. Vantomme, N. Santos, K. van
Stiphout, O. Nakatsuka, M. Adachi,
Y. Shimura, R. Loo, S. Zaima, C. Detavernier, K. Temst, and C.M.
Comrie, Workshop on "Atomically
Controlled Processing for Ultra-large Scale Integration", Leuven,
Belgium, Nov. 13-14, 2014.
- "Growth and characterization of Si1-x-ySnxCy
ternary alloy thin films for solar cell application", T.
Yamaha, H. Oda, M. Kurosawa, W. Takeuchi, O. Nakatsuka, and S. Zaima,
The 6th World Conferenceon Photovoltaic Energy Conversion (WCPEC-6),
Kyoto, Japan, Nov. 23-27, 2014.
2013
- "Defects introduced in germanium substrate by
reactive ion etching", Kusumandari, W. Takeuchi, M. Sakashita, N.
Taoka, O. Nakatsuka, S. Zaima, 5th International Symposium on
Advanced Plasma Science and its Applications for Nitrides and
Nanomaterials (ISPlasma2013), Nagoya Univ., Japan, Jan. 28-Feb. 1, 2013.
- "Control of Al2O3/Ge interfacial structures
by post oxidation technique using oxygen radical", K. Kato, S.
Shibayama, M. Sakashita, W. Takeuchi, N. Taoka, O. Nakatsuka, and S.
Zaima, 5th International Symposium on
Advanced Plasma Science and its Applications for Nitrides and
Nanomaterials (ISPlasma2013), Nagoya Univ., Japan, Jan. 28-Feb. 1, 2013.
- [Invited] "Feasibility of
Ge Device Fabrication by Low Temperature Processes on ULSI Circuits",
N. Taoka, M. Kurosawa, K. Kato, S. Shibayama, M. Sakashita, O.
Nakatsuka, and S. Zaima, 6th International WorkShop on New Group IV
Semiconductor Nanoelectronics and JSPS Core-to Core Program Joint
Seminar, Sendai, Japan, Feb. 22-23, 2013.
- "Low temperature
crystallization of group-IV semiconductors induced by eutectic metals
(Al, Sn)", M. Kurosawa, N. Taoka, M. Sakashita, O. Nakatsuka, M. Miyao,
and S. Zaima, 6th International WorkShop on New Group IV Semiconductor
Nanoelectronics and JSPS Core-to Core Program Joint Seminar, Sendai,
Japan, Feb. 22-23, 2013.
- "Control of Interfacial Reactions in Al2O3/Ge
Structures", S. Shibayama, K. Kato, M. Sakashita, W. Takeuchi, N.
Taoka, O. Nakatsuka, and S. Zaima, 6th International WorkShop on New
Group IV Semiconductor
Nanoelectronics and JSPS Core-to Core Program Joint Seminar, Sendai,
Japan, Feb. 22-23, 2013.
- "Crystalline Properties of Ge1-xSnx
Epitaxial Layers on Ge(110)", T. Asano , M. Kurosawa, N. Taoka, O.
Nakatsuka, and S. Zaima, 6th International WorkShop on New
Group IV Semiconductor
Nanoelectronics and JSPS Core-to Core Program Joint Seminar, Sendai,
Japan, Feb. 22-23, 2013.
- "Growth and Characterization of Ge1-x-ySixSny
Epitaxial Layers for Solar Cell", T. Yamaha, O. Nakatsuka, N. Taoka, W.
Takeuchi, and S. Zaima, 6th International WorkShop on New
Group IV Semiconductor
Nanoelectronics and JSPS Core-to Core Program Joint Seminar, Sendai,
Japan, Feb. 22-23, 2013.
- "Crystalline
and Electrical Properties of Ni germanium/Ge(110) Contacts", O.
Nakatsuka, J. Yokoi, Y.S. Deng, N. Taoka and S. Zaima, 6th
International WorkShop on New
Group IV Semiconductor
Nanoelectronics and JSPS Core-to Core Program Joint Seminar, Sendai,
Japan, Feb. 22-23, 2013.
- "Periodic Strain Undulation around Through Si Vias in
Wafer-On-Wafer Structures", N. Taoka, O. Nakatsuka, Y. Mizushima, H.
Kitadab,, Y. S. Kim, T. Nakamura, T. Ohba, and S. Zaima, Materials for
Advanced Metallization, Leuven, Belgium, March 10-13, 2013.
- "A comparative study of metal germanide formation on Ge1-xSnx
", J. Demeulemeester, A. Schrauwen, K. Van Stiphout, O. Nakatsuka, M.
Adachi, Y. Shimura, S. Zaima, C. M. Comrie, C. Detavernier, K. Temst,
and A. Vantommea, Materials for Advanced
Metallization, Leuven, Belgium, March 10-13, 2013.
- "Crystalline Structures and Electrical Property of Epitaxial Ni
Germanide Layers Formed on Ge(110) Substrate", Y. S.
Deng, J. Yokoi, O. Nakatsuka, N. Taoka, and Shigeaki Zaima, The 8th
International Conference on Silicon Epitaxy and Heterostructures
(ICSI-8) and the 6th International Symposium on Control of
Semiconductor Interfaces (ISCSI-VI), Fukuoka, Japan, June 2-6, 2013.
- "Lateral Growth Enhancement of Poly-Ge1-xSnx
on SiO2
using a Eutectic Reaction", M. Kurosawa, N. Taoka, M. Sakashita, O.
Nakatsuka, M. Miyao, and S. Zaima, The 8th International Conference on
Silicon Epitaxy and
Heterostructures (ICSI-8) and the 6th International Symposium on
Control of Semiconductor Interfaces (ISCSI-VI), Fukuoka, Japan, June
2-6, 2013.
- "Incorporation of a Vacancy with an Sn Atom in Epitaxial Ge1-xSnx
Film Growth at Lower Temperature", E. Kamiyama, K. Sueoka, O.
Nakatsuka, N. Taoka, S. Zaima, K. Izunome, and K. Kashima, The 8th
International Conference on Silicon Epitaxy and
Heterostructures (ICSI-8) and the 6th International Symposium on
Control of Semiconductor Interfaces (ISCSI-VI), Fukuoka, Japan, June
2-6, 2013.
- "Electrical Activity of Threading Dislocations and Defect
Complexes in GeSn Epitaxial Layers", S. Gupta, E. Simoen, T. Asano, O.
Nakatsuka, F. Gencarelli, Y. Shimura, A. Moussa, R. Loo, and Shigeaki
Zaima, The 8th International Conference on Silicon Epitaxy and
Heterostructures (ICSI-8) and the 6th International Symposium on
Control of Semiconductor Interfaces (ISCSI-VI), Fukuoka, Japan, June
2-6, 2013.
- "Formation and Characterization of Locally Strained Ge1-xSnx/Ge
Microstructures", S. Ike, Y. Moriyama, M. Kurosawa, N. Taoka, O.
Nakatsuka, Y. Imai, S. Kimura, T. Tezuka, and Shigeaki Zaima,The 8th
International Conference on Silicon Epitaxy and
Heterostructures (ICSI-8) and the 6th International Symposium on
Control of Semiconductor Interfaces (ISCSI-VI), Fukuoka, Japan, June
2-6, 2013.
- "Crystalline Phase Control of Pr-Oxide Films by Regulating
Oxidant Partial Pressure and Si Diffusion", K. Kato, M. Sakashita, W.
Takeuchi, N. Taoka, O. Nakatsuka, and S. Zaima,The 8th International
Conference on Silicon Epitaxy and
Heterostructures (ICSI-8) and the 6th International Symposium on
Control of Semiconductor Interfaces (ISCSI-VI), Fukuoka, Japan, June
2-6, 2013.
- "Epitaxial Growth of Strained Ge Layer on Si1-xGex
Substrate Formed with Traveling Liquidus-Zone Method", T. Yamaha, O.
Nakatsuka, N. Taoka, K. Kinoshita, S. Yoda, and S. Zaima, The 8th
International Conference on Silicon Epitaxy and
Heterostructures (ICSI-8) and the 6th International Symposium on
Control of Semiconductor Interfaces (ISCSI-VI), Fukuoka, Japan, June
2-6, 2013.
- "Influence of Ge Substrate Orientation on Crystalline Structures
of Ge1-xSnx
Epitaxial Layers", T. Asano, S. Kidowaki, M. Kurosawa, N. Taoka, O.
Nakatsuka, and S. Zaima, The 8th International Conference on Silicon
Epitaxy and
Heterostructures (ICSI-8) and the 6th International Symposium on
Control of Semiconductor Interfaces (ISCSI-VI), Fukuoka, Japan, June
2-6, 2013.
- "Formation of Tetragonal ZrO2 Thin
Film by ALD Method", K. Kato, T. Saito, M. Sakashita, W. Takeuchi, N.
Taoka, O. Nakatsuka, S. Zaima, The 8th International Conference on
Silicon Epitaxy and
Heterostructures (ICSI-8) and the 6th International Symposium on
Control of Semiconductor Interfaces (ISCSI-VI), Fukuoka, Japan, June
2-6, 2013.
- "Impacts of AlGeO Formation by Post Thermal Oxidation of Al2O3/Ge
Structure on Interface Properties", S. Shibayama, K. Kato, M.
Sakashita, W. Takeuchi, N. Taoka, O. Nakatsuka, and S. Zaima, The 8th
International Conference on Silicon Epitaxy and
Heterostructures (ICSI-8) and the 6th International Symposium on
Control of Semiconductor Interfaces (ISCSI-VI), Fukuoka, Japan, June
2-6, 2013.
- "Potential
of GeSn and GeSiSn for Future Nanoelectronic Device Applications", S.
Zaima, JSPS Core-to-Core Program Seminar "Atomically Controlled
Processing for Ultralarge Scale Integration", Fukuoka, Japan, June 6,
2013.
- "Physical Factor of Other Element Incorporation for Tetragonal ZrO2
Formation",
K. Kato, T. Saito, M. Sakashita, W. Takeuchi, N. Taoka, O. Nakatsuka,
and S. Zaima, NIMS Conference 2013 Structure Control of Atomic /
Molecular Thin Films and Their Applciations,Tsukuba, Japan, July 1-3.
- "Reduction
of Schottky Barrier Height for n-type Ge Contact by using Sn
Electrode", A. Suzuki, Shunsuke Asaba, J. Yokoi, O. Nakatsuka, M.
Kurosawa, K. Kato, M. Sakashita, N. Taoka, and S. Zaima, International
Conference on Solid State
Devices and Materials (SSDM2013), Fukuoka, Japan,
Sept. 24-27, 2013.
- "Large
grain growth of poly-GeSn on insulator by pulsed laser annealing in
water", M. Kurosawa, N. Taoka, H. Ikenoue, O. Nakatsuka, and S. Zaima,
International
Conference on Solid State
Devices and Materials (SSDM2013), Fukuoka, Japan,
Sept. 24-27, 2013.
- "Interaction
of Sn atoms with Defects Introduced by Ion Implantation in Ge
Substrate", T. Arahira, M. Fukudome, N. Taoka, W. Takeuchi, M.
Sakashita, O. Nakatsuka, and S. Zaima, International
Conference on Solid State
Devices and Materials (SSDM2013), Fukuoka, Japan,
Sept. 24-27, 2013.
- "Engineering of Energy Band
Structure with Epitaxial Ge1-x-ySixSny/n-Ge
Hetero Junctions for Solar Cell Applications", S. Asaba, T. Yamaha, M.
Kurosawa, M. Sakashita, N. Taoka, O. Nakatsuka, S. Zaima, International
Conference on Solid State
Devices and Materials (SSDM2013), Fukuoka, Japan,
Sept. 24-27, 2013.
- "Formation and Crystalline Structure of Ni
Silicides on Si(110) Substrate", O.
Nakatsuka, M. Hasegawa, K. Kato, N. Taoka, and S. Zaima, Advanced Metallization Conference 2013 (ADMETA Plus
2013),
Tokyo, Japan, Oct. 7-10, 2013.
- "Thermal
Stability of Epitaxial NiGe Layers Formed on Ge(110) Substrate", Y. S.
Deng, O. Nakatsuka, N. Taoka, and S. Zaima, Advanced Metallization
Conference 2013 (ADMETA Plus 2013), Tokyo, Japan, Oct. 7-10, 2013.
- "Fluctuation of Lattice Spacing around
Trough Si Vias in Wafer -on -wafer Structures", N. Taoka, O. Nakatsuka,
Y. Mizushima, H. Kitada, Y. S. Kim, T. Nakamura, T. Ohba, and S. Zaima,
Advanced Metallization Conference 2013 (ADMETA Plus 2013),
Tokyo, Japan, Oct. 7-10, 2013.
- "Fluctuation
of Lattice Spacing around Trough Si
Vias in Wafer -on -wafer Structures", N. Taoka, O. Nakatsuka, Y.
Mizushima, H. Kitada, Y. S. Kim, T. Nakamura, T. Ohba, and S. Zaima,
Advanced Metallization Conference(AMC) Conference, Albany, USA, Oct. 21-23, 2013.
- "Stabilization for Higher-k Films with
Meta-Stable Crystalline Structure", K.
Kato, T. Saito, M. Sakashita, W. Takeuchi, N. Taoka, O. Nakatsuka, and
S. ZaimaJSPS
Core-to-Core Program Workshop "Atomically Controlled Processing for
Ultralarge Scale Integration", Frankfurt (Oder), Germany, Oct. 24-25,
2013.
- "Interaction between Sn atoms and Defects
Introduced by Ion Implantation in Ge Substrate", N. Taoka, M. Fukudome, T. Arahira, W. Takeuchi, M.
Sakashita, O. Nakatsuka, and S. Zaima, JSPS
Core-to-Core Program Workshop "Atomically
Controlled Processing for Ultralarge Scale Integration", Frankfurt
(Oder), Germany, Oct. 24-25, 2013.
- [Invited] "Heteroepitaxial Growth of Sn-Related Group-IV Materials on Si Platform
for Microelectronic and Optoelectronic Applications: Challenges and
Opportunities", O. Nakatsuka, N. Taoka, T. Asano, T.
Yamaha, M.
Kurosawa, , M. Sakashita, S. Zaima, , 224th The Electrochemical Society
(ECS) Meeting, San Francisco, USA, Oct. 27-Nov. 1, 2013.
- "Characterization of Local Strain
Structures in Heteroepitaxial Ge1-xSnx/Ge
Microstructures by Using Microdiffraction Method ", S. Ike, Y.
Moriyama, M. Kurosawa, N. Taoka, O. Nakatsuka, Y. Imai, S. Kimura, T.
Tezuka, and S. Zaima, 224th The Electrochemical Society (ECS) Meeting,
San Francisco, USA, Oct. 27-Nov. 1, 2013.
- "Reduction of Interface States Density Due
to Post Oxidation with Formation of AlGeO Layer at Al2O3/Ge
Interface", S. Shibayama, K. Kato, M. Sakashita, W. Takeuchi , N.
Taoka, O. Nakatsuka, and S. Zaima, 224th The Electrochemical Society
(ECS) Meeting, San Francisco, USA, Oct. 27-Nov. 1, 2013.
- "Quantitative Guideline for Formation of Ge
MOS Interface with Low Interface State Density", S. Shibayama, K. Kato,
N. Taoka, M. Sakashita, O. Nakatsuka, and S. Zaima, 2013 International
Workshop on DIELECTRIC THIN FILMS FOR FUTURE ELECTRON DEVICES - SCIENCE
AND TECHNOLOGY -, pp. 7-8, Tokyo, Japan, Nov. 7-9, 2013.
- "Interface Properties of Al2O3/Ge
MOS Structures with Thin Ge Oxide Interfacial Layer Formed by Pulsed
MOCVD", T. Yoshida, K. Kato, S. Shibayama, M. Sakashita, N. Taoka, W.
Takeuchi, O. Nakatsuka, and S. Zaima, 2013 International Workshop on
DIELECTRIC THIN
FILMS FOR FUTURE ELECTRON DEVICES - SCIENCE AND TECHNOLOGY -, pp. 9-10,
Tokyo,
Japan, Nov. 7-9, 2013.
- "Robustness of Sn Precipitation During
Thermal Process of Ge1–xSnx", K. Kato, T. Asano,
N. Taoka, M. Sakashita, O. Nakatsuka, and S. Zaima, 2013 International
Workshop on DIELECTRIC THIN
FILMS FOR FUTURE ELECTRON DEVICES - SCIENCE AND TECHNOLOGY -, pp.
99-100, Tokyo,
Japan, Nov. 7-9, 2013.
- [Invited] "Sn-related Group-IV Semiconductor Materials for
Electronic and Optoelectronic Applications",
O. Nakatsuka, N. Taoka, T. Asano, T. Yamaha, M. Kurosawa, W. Takeuchi,
M. Sakashita, and S. Zaima, The 3rd International Conference on
Nanoteck & Expo, Las Vegas, USA, Dec. 2-4, 2013.
- [Invited] "Development of Ge1-xSnx
and Ge1-x-ySixSny
Thin Film Materials for Future Electronic Applications", O. Nakatsuka,
N. Taoka, T. Asano, T. Yamaha, M. Kurosawa, K. Kato, W. Takeuchi, M.
Sakashita, and S. Zaima, International Conference on THERMEC' 2013, Las
Vegas, USA, Dec. 2-6, 2013.
2012
- "The effect of light exposure on the electrical
properties of GeO2/Ge gate stack",
Kusumandari, W. Takeuchi, M.
Sakashita, O. Nakatsuka, and S. Zaima, 4th International Symposium on
Advanced Plasma Science and its Applications for Nitrides and
Nanomaterials (ISPlasma2012), Chubu Univ., Japan, March 4-8, 2012.
- "Effect of N Radical Process on Interfacial and Electrical
Properties of Al2O3/Ge
Structure", K. Kato, M. Sakashita, W. Takeuchi, O. Nakatsuka, and S.
Zaima, The 5th International Conference on PLasma-NanoTechnology &
Science (IC-PLANTZ2012), Inuyama, Japan, March 9-10, 2012.
- "Comprehensive Characterization of Local Strain around Trough
Silicon Via Interconnects for 3-Dimentional Devices", O. Nakatsuka, H.
Kitada, Y. S. Kim, Y. Mizushima, T. Nakamura, T. Ohba, and S. Zaima,
The 12th International Workshop on Stress-Induced
Phenomena in Microelectronics, Kyoto, Japan, May 29, 2012.
- "Epitaxial Growth and Anisotropic Strain Relaxation of Ge1-xSnx
Layers on Ge(110) Substrates", T. Asano, Y. Shimura, N. Taoka, O.
Nakatsuka, and S. Zaima, The 6th International SiGe
Technology and Device Meeting (ISTDM2012), No. 4.3, Barkeley, USA, June
4-6,
2012.
- "Effect of Gate Metal Electrode on Chemical Bonding State in
Metal/Pr-oxide/Ge Gate Stack Structure",
K. Kato, M. Sakashita, W. Takeuchi, N. Taoka, O. Nakatsuka, and S.
Zaima, The 6th International SiGe Technology and Device Meeting
(ISTDM2012), No. 7.4, Barkeley, USA, June 4-6, 2012.
- "Optical Properties of Ge1-xSnx
Epitaxial Layers with Very High Sn Contents", M. Nakamura, Y. Shimura,
W. Takeuchi, N. Taoka, O. Nakatsuka, and S. Zaima, The 6th
International SiGe Technology and Device Meeting (ISTDM2012), No. 10.2,
Barkeley, USA, June 4-6, 2012
- [Invited] "Material
properties and applications of Ge1-xSnx alloys
for Ge Nanoelectronics",
O. Nakatsuka, Y. Shimura, W. Takeuchi, and S. Zaima, The 6th
International SiGe Technology and Device Meeting (ISTDM2012), No. 12.1,
Barkeley, USA, June 4-6, 2012.
- "Electrical Characterization of p-Ge1-xSnx/p-Ge
and p-Ge1-xSnx/n-Ge Heterostructures by Numerical
Simulation of Admittance Spectroscopy", B. Baert, D. Y. N. Truonga, O.
Nakatsuka, S. Zaima, and N. D. Nguyen, The 6th International SiGe
Technology and Device Meeting (ISTDM2012), No. P1.16, Barkeley, USA,
June 4-6, 2012
- "Control of Interfacial and Electrical Properties of
Metal/Pr-oxide/Ge Gate Stack Structures", K.
Kato, M. Sakashita, W. Takeuchi, N. Taoka, O. Nakatsuka, S. Zaima, CNSE
and JSPS Core-to-Core Program Joint Seminar, No. 9, Albany, USA, June
8, 2012.
- "Epitaxial Growth and Characterization of GeSn Layers on Ge(110)
and Si(110) Substrates", T. Asano, S. Kidowaki, Y. Shimura, N. Taoka,
O. Nakatsuka, S. Zaima, CNSE and JSPS Core-to-Core Program Joint
Seminar, No. 10, Albany, USA, June 8, 2012.
- "GeSn Alloy for Nanoelectronic and Optoelectronic Devices", O.
Nakatsuka, Y. Shimura, W. Takeuchi, N. Taoka and S. Zaima, CNSE and
JSPS Core-to-Core Program Joint Seminar, No. 12, Albany, USA, June 8,
2012.
- "Effects
of Light and Air Exposures on Electrical Properties of GeO2/Ge
and
Al2O3/Ge Gate Stack Structures", Kusumandari, W.
Takeuchi, K. Kato, S.
Shibayama, M. Sakashita, N. Taoka, O. Nakatsuka, and S. Zaima, 2012 Asia-Pacific Workshop on Fundamentals and
Applications of Advanced Semiconductor Devices (AWAD2012), Naha, Japan,
June 27-29, 2012.
- [Invited] "Potential of
GeSn Alloys for Application to Si Nanoelectronics", S. Zaima, Y.
Shimura, M. Nakamura, W. Takeuchi, M. Sakashita, O. Nakatsuka, 2012 Asia-Pacific Workshop on Fundamentals and
Applications of Advanced Semiconductor Devices (AWAD2012), Naha, Japan,
June 27-29, 2012.
- "Epitaxial Growth and Characterizations of
Ge1-xSnx and Ge1-x-ySixSny
Thin Layers for Nanoelectronic and Optoelectronic Applications", O.
Nakatsuka, N. Taoka, M. Sakashita, W. Takeuchi, S. Zaima, University of Vigo and JSPS Core-to-Core Program Joint
Seminar, Vigo, Spain, Sept. 4-6, 2012.
- "High Mobility Poly-GeSn Layer Formed by Low Temperature Solid
Phase Crystallization", W. Takeuchi, N. Taoka, M. Kurosawa, M.
Fukutome, M. Sakashita, O. Nakatsuka, and S. Zaima, International
Conference on Solid State
Devices and Materials (SSDM2012), Kyoto, Japan,
Sept. 25-27, 2012.
- "Impact of Sn corporation on
Epitaxial Growth of Ge Layers on Si(110)
Substrates", S. Kidowaki, T. Asano, Y. Shimura, N. Taoka, O.
Nakatsuka, and S. Zaima, International Conference on Solid State
Devices and Materials (SSDM2012), Kyoto, Japan,
Sept. 25-27, 2012.
- "Interfacial Reaction Mechanism in Al2O3/Ge
Structure by Oxygen Radical", K. Kato, S. Shibayama, M. Sakashita, W.
Takeuchi, N. Taoka, O. Nakatsuka, and S. Zaima, International
Conference on Solid State Devices and Materials (SSDM2012), Kyoto, Japan, Sept. 25-27,
2012.
- "In situ Sb doping in Ge1-xSnx
Epitaxial Layers with High Sn Contents", K. Hozaki, M. Nakamura, Y.
Shimura, W. Takeuchi, N. Taoka, O. Nakatsuka, and S. Zaima, IUMRS International Conference on Electronic Materials
(IUMRS-ICEM2012), Yokohama, Japan, Sept. 23-28, 2012.
- "Epitaxial Growth of Ge1-xSnx Layers on
(110)-oriented Si and Ge Substrates", T. Asano, S. Kidowaki, Y.
Shimura, N. Taoka, O. Nakatsuka, and S. Zaima, IUMRS
International Conference on Electronic Materials (IUMRS-ICEM2012),
Yokohama, Japan, Sept. 23-28, 2012.
- "Thermal Oxidation Mechanism of Ge through Al2O3
Layer Formed on Ge Substrate", S. Shibayama, K. Kato, M. Sakashita, W.
Takeuchi, N. Taoka, O. Nakatsuka, and S. Zaima, IUMRS
International Conference on Electronic Materials (IUMRS-ICEM2012),
Yokohama, Japan, Sept. 23-28, 2012.
- "Importance of Si Bandbending at Zero Bias Condition for Schottky
Barrier Height Control at Metal/Si Interfaces with Ultra-thin Al2O3
Layer", H. Matsushita, W. Takeuchi, M. Sakashita, N. Taoka, O.
Nakatsuka and S. Zaima, IUMRS International
Conference on Electronic Materials (IUMRS-ICEM2012), Yokohama, Japan,
Sept. 23-28, 2012.
- "Electrical Properties of Epitaxially Grown p+-Ge
1-x
Snx/n-Ge
Diodes", S. Asaba, J. Yokoi, H. Matsuhita, D. Yunsheng, N. Taoka, O.
Nakatsuka, and S. Zaima, IUMRS International
Conference on Electronic Materials (IUMRS-ICEM2012), Yokohama, Japan,
Sept. 23-28, 2012.
- [Invited] "Technology of Ge1-xSnx
Thin Films for Future Si Nanoelectronics", O.
Nakatsuka and S. Zaima, The 6th Kentingan Physics Forum: International
Conference on Physics and Its Applications (ICOPIA), Solo, Indonesia,
Oct. 3, 2012.
- [Invited]
"Growth and Optical Properties of Ge1-xSnx
Alloy Thin Films with a High Sn Content",
S. Zaima, O. Nakatsuka, M. Nakamura, W. Takeuchi, Y. Shimura, and N.
Taoka, The PRiME 2012 Joint International (222nd) ECS Meeting,
Honolulu, USA, Oct. 8-12, 2012.
- "Growth
and Characterization of Heteroepitaxial Layers of Ge1-x-ySixSny
Ternary Alloy", T. Yamaha, O. Nakatsuka, S. Takeuchi, W. Takeuchi, N.
Taoka, K. Araki, K. Izunome, and S. Zaima, The PRiME 2012 Joint
International 222nd ECS Meeting, Honolulu,
USA, Oct. 8-12, 2012.
- "Impedance Spectroscopy of GeSn/Ge
Heterostructures by a Numerical Method",
B. Baert, O. Nakatsuka, S. Zaima, and N. Nguyen, The PRiME 2012 Joint International 222nd ECS Meeting, Honolulu, USA, Oct. 8-12, 2012.
- "Formation and Stress Characterization of NiGe/Ge(110) and
Ge(001) Contacts", Y. Deng, J. Yokoi, O.
Nakatsuka, and S. Zaima, Advanced Metallization
Conference 2012: The 22nd Asian Session, Tokyo, Japan, Oct. 23-25, 2012.
2011
- "Influence of Light Radiation on Electrical
Properties of Al2O3/Ge and GeO2/Ge
Gate Stacks in Nitrogen Plasma", Kusumandari, W. Takeuchi, K. Kato, M.
Sakashita, O. Nakatsuka, S. Zaima, 2011 International Workshop on
Dielectric Thin Films for Future Electron Devices: Science and
Technology, p. 27-28, Tokyo, Japan, Jan. 20-21, 2011.
- "Control of Interfacial Properties of Al2O3/Ge
Gate Stack Structure using Radical Nitridation Technique", K. Kato, S.
Kyogoku, M. Sakashita, W. Takeuchi, H. Kondo, O. Nakatsuka, S. Zaima,
2011 International Workshop on
Dielectric Thin Films for Future Electron Devices: Science and
Technology, p. 71-72, Tokyo, Japan, Jan. 20-21, 2011.
- "Characterization of Damages of Al2O3/Ge
Gate Stacks Structure
Induced with Light Radiation during Plasma Nitridation", Kusumandari,
W. Takeuchi, K. Kato, M. Sakashita, O. Nakatsuka, S. Zaima, 3rd
International Symposium on Advanced Plasma Science and its Application
for Nitrides and Nanomaterials (ISPLasma2011), p. 43, Nagoya, Japan,
Mar. 6-9, 2011.
- "Control of Surface and Interfacial Structure by Radical
Nitridation Technique for Ge MOS Transistors", K. Kato, H. Kondo, M.
Sakashita, W. Takeuchi, O. Nakatsuka, and S. Zaima, The 4th
International Conference on PLAsma-Nano Technology & Science, p.
43, Gifu, Japan, Mar. 10-12, 2011.
- "Epitaxial Growth of Ge1-xSnx for Strained
Ge CMOS Devices", S. Zaima, Y. Shimura, S. Takeuchi, and O. Nakatsuka,
THERMEC' 2011 (International Conference on Processing &
Manufacturing of Advanced Materials), Quebec, Canada, Aug. 1-5, 2011.
- "Growth of Ge1-xSnx
heteroepitaxial layers
with very high Sncontents on InP(001) substrates", M. Nakamura, Y.
Shimura, S. Takeuchi , O. Nakatsuka, and S. Zaima,7th International
Conference on Si Epitaxy and Heterostructures, Leuven, Belgium, Aug.
28-Sep.1, 2011.
- "In-situ Ga Doping to Fully Strained Ge1-xSnx
Heteroepitaxial Layers Grown on Ge(001) Substrates", Y. Shimura, S.
Takeuchi, O. Nakatsuka, B. Vincent, F. Gencarelli, T. Clarysse, W.
Vandervorst, M. Caymax, R. Loo, and S. Zaima, 7th International
Conference on Si Epitaxy and Heterostructures, Leuven, Belgium, Aug.
28-Sep.1, 2011.
- "Low Temperature Formation of Si1-x-yGexSny-on-Insulator
Structures by Using Solid-Phase Mixing of Ge1-zSnz/Si-on-Insulator
Substrates",
K. Mochizuki, T. Yamaha, Y. Shimura, O. Nakatsuka, and S. Zaima, 7th
International Conference on Si Epitaxy and Heterostructures, Leuven,
Belgium, Aug. 28-Sep.1, 2011.
- "Improvement of Al2O3 Interfacial
Properties by O2
Annealing", S. Shibayama, K. Kato, M. Sakashita, W. Takeuchi, O.
Nakatsuka, and S. Zaima, 7th International Conference on Si Epitaxy and
Heterostructures, Leuven, Belgium, Aug. 28-Sep.1, 2011.
- "Homogeneous Si0.5Ge0.5
Bulk Crystal Growth
as Substrates for Strained Ge Thin Films by the Traveling Liquidus-Zone
Method", K. Kinoshita, O. Nakatsuka, S. Yoda, and S. Zaima, 7th
International Conference on Si Epitaxy and Heterostructures, Leuven,
Belgium, Aug. 28-Sep.1, 2011.
- "MBE growth and crystalline properties of GeSn heteroepitaxial
layers", Y. Shimura, 2nd GeSnWorkshop: GeSn Development and Future
Applications,Leuven, Belgium, Sept. 2, 2011.
- "Electrical and optical properties of GeSn alloys", O. Nakatsuka,
Y. Shimura, M. Adachi, M. Nakamura, and S. Zaima, 2nd GeSnWorkshop:
GeSn Development and Future Applications, Leuven, Belgium, Sept. 2,
2011.
- "Comprehensive Study of Local Strain Structures with High Strain
Resolution for Through-Silicon Via Interconnects", O. Nakatsuka, H.
Kitada, Y. S. Kim, Y. Mizushima, T. Nakamura, T. Ohba, and S. Zaima,
Advanced Metallization Conference 2011: 21st Asian Session, Tokyo,
Japan, Sept. 13-15, 2011.
- "Formation and Properties of Epitaxial NiGe/Ge(110) Contacts", J.
Yokoi, O. Nakatsuka, and S. Zaima, International Conference on Solid
State Devices and Materials (SSDM2011), Nagoya, Japan, Sept. 28-30,
2011.
- "Strain and Dislocation Structures of Ge1-xSnx
Heteroepitaxial Layers Grown on Ge(110) Substrates", T. Asano, Y.
Shimura, O. Nakatsuka, and S. Zaima, International Conference on Solid
State Devices and Materials (SSDM2011), Nagoya, Japan, Sept. 28-30,
2011.
- "Strained Ge Layers on SiGe(Sn) Buffer Layers Formed
by
Solid-phase Mixing Method", T. Yamaha, K. Mochizuki, Y. Shimura,
O.Nakatsuka, and S. Zaima, International Conference on Solid State
Devices and Materials (SSDM2011), Nagoya, Japan, Sept. 28-30, 2011.
- "Control of Defect Properties in Ge Heteroepitaxial Layers by Sn
Incorporation and H2-Annealing",
M. Adachi, Y. Shimura, O. Nakatsuka, and S. Zaima, International
Conference on Solid State Devices and Materials (SSDM2011), Nagoya,
Japan, Sept. 28-30, 2011.
- "Comprehensive Study of Local Strain Structures with High Strain
Resolution for Through-Silicon Via Interconnects", O. Nakatsuka, H.
Kitada, Y. S. Kim, Y. Mizushima, T. Nakamura, T. Ohba, and S. Zaima,
Advanced Metallization Conference (AMC), San Diego, USA, Oct. 4-6, 2011.
- [Invited] "GeSn
Technology: Impact of Sn on Ge CMOS Applications", S. Zaima, O.
Nakatsuka, Y. Shimura, S. Takeuchi, B. Vincent, F. Gencarelli, T.
Clarysse, J. Demeulemeester, K. Temst, A. Vantomme, M. Caymax, and R.
Loo, 220th Electro Chemical Society Meeting, Boston, USA, Oct. 9-14,
2011.
- "Effect of Chemical Bonding State on Electrical Properties of Al2O3/Ge
Structure",
K. Kato, M Sakashita, W. Takeuchi, O. Nakatsuka, and S. Zaima, The 15th
International Conference on Thin Films (ICTF-15), Kyoto, Japan, Nov.
8-11, 2011.
- "Suppressive Effect of Interface Reaction and Water Absorption by
Al Incorporation into Pr-oxide Film", W. Takeuchi, K. Furuta, K. Kato,
M. Sakashita, H. Kondo, O. Nakatsuka, and S. Zaima, The 15th
International Conference on Thin Films (ICTF-15), Kyoto, Japan, Nov.
8-11, 2011.
- [Invited] "Materials
Innovation in Si Nanoelectronics", S. Zaima and O. Nakatsuka, 2011
Tsukuba Nanotechnology Symposium (TNS'11), Tsukuba, Japan, Dec. 15-17,
2011.
2010
- [Invited] "Potential of Ge1-xSnx
alloys as high mobility channel materials and stressors", S. Takeuchi,
Y. Shimura, T. Tsutsui, O. Nakatsuka, A.
Sakai, and S. Zaima, 5th International WorkShop on New Group IV
Semiconductor Nanoelectronics, pp. 67-68, Sendai, Japan, Jan. 29-30,
2010.
- "Microscopic characterization of Si(011)/Si(001) direct silicon
bonding substrates", T. Kato, T. Ueda, Y. Ohara, J. Kikkawa, Y.
Nakamura, A. Sakai, O. Nakatsuka, S. Zaima, E. Toyoda, K. Izunome, Y.
Imai, S. Kimura, and O. Sakata, 5th International WorkShop on New Group
IV Semiconductor Nanoelectronics, pp. 37-38, Sendai, Japan, Jan. 29-30,
2010.
- "Control of Local Strain Structures by Microfabricated Shapes of
Ge/Si1-xGex Layers", K. Mochizuki, T. Mizutani,
O. Nakatsuka, H. Kondo, and S. Zaima, 5th International WorkShop on New
Group
IV Semiconductor Nanoelectronics, pp. 41-42, Sendai, Japan, Jan. 29-30,
2010.
- "Strain Relaxation Behavior of Ge1-xSnx
Buffer
Layers on Si and Virtual Ge Substrates", Y. Shimura, S. Takeuchi, N.
Tsutsui, O. Nakatsuka, A. Sakai, and S. Zaima, 5th International
WorkShop on New Group
IV Semiconductor Nanoelectronics, pp. 43-44, Sendai, Japan, Jan. 29-30,
2010.
- "Crystalline Orientation Dependence of Electrical Properties on
Mn Germanide/Ge(111) and (001) Schottky Contacts", T. Nishimura, O.
Nakatsuka, and S. Zaima, Materials for Advanced Metallization,
Mechelen, Belgium, Mar. 7-10, 2010.
- [Invited] "Ge1-xSnx
stressors for strained-Ge CMOS",S. Takeuchi, Y. Shimura, T. Nishimura,
B. Vincent, G. Eneman, T. Clarysse, A. Vantomme, J. Dekoster, M.
Caymax, R. Loo, O. Nakatsuka, and S. Zaima, 5th International SiGe
Technology Device Meeting 2010 (ISTDM2010), Stockholm, Sweden, May
24-26, 2010.
- "Control of Strain Relaxation Behavior of Ge1-xSnx
Layers: Toward Tensile-Strained Ge Layers with Strain Value over 1%",
Y. Shimura, S. Takeuchi, N. Tsutsui, O. Nakatsuka, A. Sakai, and S.
Zaima, 5th International SiGe Technology Device Meeting 2010
(ISTDM2010), Stockholm, Sweden, May 24-26, 2010.
- "Formation of Ni(Ge1-xSnx)
Layers with Solid-Phase Reaction in Ni/Ge1-xSnx/Ge
Systems", T. Nishimura, Y. Shimura, S. Takeuchi, B. Vincent, A.
Vantomme, J. Dekoster, M. Caymax, R. Loo, O. Nakatsuka, and S. Zaima,
5th International SiGe Technology Device Meeting 2010 (ISTDM2010),
Stockholm, Sweden, May 24-26, 2010.
- "Control of Interfacial Properties of Pr-oxide/Ge Gate Stack
Structure by Introduction of Nitrogen", K. Kato, H. Kondo, M.
Sakashita, O. Nakatsuka, and S. Zaima, 5th International SiGe
Technology Device Meeting 2010 (ISTDM2010), Stockholm, Sweden, May
24-26, 2010.
- "GeSn: future applications and strategy", R. Loo, M. Caymax, B.
Vincent, J. Dekoster, S. Takeuchi, O. Nakatsuka, S. Zaima, K.
Temst, and A. Vantomme, International Workshop of GeSn
Developments and Future Applications, Heverlee-Leuven, Belgium, May 28,
2010.
- "Epitaxial GeSn Growth using MBE", Y. Shimura, International
Workshop of GeSn Developments and Future Applications, Heverlee-Leuven,
Belgium, May 28, 2010.
- "Material Assessment for uni-axial strained Ge pMOS -1:
Characterization of GeSn(B) materials", B. Vincent, Y. Shimura, S.
Takeuchi, T. Nishimura, J. Demeulemeester, G. Eneman, T. Clarysse, W.
Vandervorst, A. Vantomme, O. Nakatsuka, S. Zaima, J. Dekoster, M.
Caymax, and R. Loo, International Workshop of GeSn Developments and
Future Applications, Heverlee-Leuven, Belgium, May 28, 2010.
- "Material Assessment for uni-axial strained Ge pMOS-2: Formation
of Ni(GeSn) Layers with Solid-Phase Reactor ", T. Nishimura, Y.
Shimura, S. Takeuchi, B. Vincent, A. Vantomme, J. Dekoster, M. Caymax,
R. Loo, O. Nakatsuka, and S. Zaima, International Workshop of GeSn
Developments and Future Applications, Heverlee-Leuven, Belgium, May 28,
2010.
- "Bi-axially strained Ge grown on GeSn SRBs", O. Nakatsuka, S.
Takeuchi, Y. Shimura, A. Sakai, S. Zaima, International Workshop of
GeSn Developments and Future Applications, Heverlee-Leuven, Belgium,
May 28, 2010.
- "(Si)GeSn requirements for optical device applications and solar
cells", S. Takeuchi, B. Vincent, K. Temst, A. Vantomme, J. Dekoster, M.
Caymax, R. Loo, O. Nakatsuka, and S. Zaima, International Workshop of
GeSn Developments and Future Applications, Heverlee-Leuven, Belgium,
May 28, 2010.
- "Strained Ge and Ge1-xSnx technology for future CMOS devices ",
S. Zaima, O. Nakatsuka, S. Takeuchi, Y. Shimura, A. Sakai, H. Kondo,
and M. Sakashita, International Symposium on Technology Evolution for
Silicon Nano Electronics (ISTESNE), Tokyo, Japan, June 3-5, 2010.
- "Formation of Ge1-xSnx
heteroepitaxial layers with high Sn content", Y. Shimura, S. Takeuchi,
O. Nakatsuka, A. Sakai, and S. Zaima, International Symposium on
Technology Evolution for Silicon Nano Electronics (ISTESNE), Tokyo,
Japan, June 3-5, 2010.
- "Control of strain structure by microfabrication of Ge/Si1-xGex
layers on Si(001) Substrates", K. Mochizuki, T. Mizutani, O. Nakatsuka,
H. Kondo, and S. Zaima, International Symposium on Technology Evolution
for Silicon Nano Electronics (ISTESNE), Tokyo, Japan, June 3-5, 2010.
- "Dependence of electrical properties on crystalline
structures of Mn5Ge3/Ge
Schottky contacts", T. Nishimura, O. Nakatsuka, S. Akimoto, and S.
Zaima, International Symposium on Technology Evolution for Silicon Nano
Electronics (ISTESNE), Tokyo, Japan, June 3-5, 2010.
- "Impact
of nitride interfacial layer on electrical properties of
high-k/Ge stacked structures", K. Kato, H. Kondo, M. Sakashita, O.
Nakatsuka, and S. Zaima, International Symposium on Technology
Evolution
for Silicon Nano Electronics (ISTESNE), Tokyo, Japan, June 3-5, 2010.
- "Crystalline
and electrical properties of PrAlO gate insulator
films formed by atomic layer deposition", K. Furuta, W. Takeuchi, M.
Sakashita, H. Kondo, O. Nakatsuka, and S. Zaima, International
Symposium
on Technology Evolution for Silicon Nano Electronics (ISTESNE), Tokyo,
Japan, June 3-5, 2010.
- "Nitrogen content dependence of crystalline and electrical
properties of ternary transition metal gate electrodes", H. Matsushita,
K. Miyamoto, K. Furumai, H. Kondo, M. Sakashita, O. Nakatsuka, and S.
Zaima, International Symposium on Technology Evolution for Silicon Nano
Electronics (ISTESNE), Tokyo, Japan, June 3-5, 2010.
- "Structural
change during the formation of directly bonded
silicon substrates", T. Kato, T. Ueda, Y. Ohara, J. Kikkawa, Y.
Nakamura, A. Sakai, O. Nakatsuka, S. Zaima, E. Toyoda, K. Izunome, Y.
Imai, S. Kimura, and O. Sakata, International Symposium on Technology
Evolution for Silicon Nano Electronics (ISTESNE), Tokyo, Japan, June
3-5, 2010.
- "Microscopic structure of directly bonded silicon substrates", T.
Kato, Y. Ohara, T. Ueda, J. Kikkawa, Y. Nakamura, A. Sakai, O.
Nakatsuka, M. Ogawa, S. Zaima, E. Toyoda, H. Isogai, T. Senda, K.
Izunome, H. Tajiri, O. Sakata, and S. Kimura, International Symposium
on
Technology Evolution for Silicon Nano Electronics (ISTESNE), Tokyo,
Japan, June 3-5, 2010.
- "Growth and Characterization of GeSn and Tensile-Strained Ge
Layers for High Mobility Channels of CMOS Devices",
O. Nakatsuka, Y. Shimura, S. Takeuchi, and S. Zaima, The 7th Pacific
Rim International Conference on Advanced Materials and Processing,
Cairns, Australia, Aug 2-6, 2010.
- "Effects of Al Incorporation into Pr-oxides Formed by Atomic
Layer Deposition", K. Furuta, W. Takeuchi, M. Sakashita, K. Kato, H.
Kondo, O. Nakatsuka, and S. Zaima, 2010 International Conference on
Solid State Devices and Materials (SSDM 2010), Tokyo, Japan, Sept.
22-24, 2010.
- "Analysis of Local Leakage Current of Pr Oxide Thin Films with
Conductive Atomic Force Microscopy", M. Adachi, M. Sakashita, H. Kondo,
W. Takeuchi, O. Nakatsuka, and S. Zaima, 2010 International Conference
on Solid
State Devices and Materials (SSDM 2010), Tokyo, Japan, Sept. 22-24,
2010.
- "Effect of Valence State of Pr on Interfacial Structure and
Electrical Properties of Pr-oxide/PrON/Ge Gate Stack Structure",
K. Kato, M. Sakashita, W. Takeuchi, H. Kondo, O. Nakatsuka, and S.
Zaima, 2010 International Conference on Solid State Devices and
Materials (SSDM 2010), Tokyo, Japan, Sept. 22-24, 2010.
- "Characterization
of Local Strain around Through-Silicon Via Interconnectsby using X-ray
Microdiffraction", O. Nakatsuka, H. Kitada, Y. S. Kim, Y. Mizushima, T.
Nakamura, T. Ohba, and S. Zaima, Advanced Metallization Conference
2010, Albany, USA, Oct. 5-7, 2010.
- [Invited] "Assessment of
Ge1-xSnx
Alloys for Strained Ge CMOS Devices", S. Takeuchi, Y. Shimura, T.
Nishimura, B. Vincent, G. Eneman, T. Clarysse, J. Demeulemeester, K.
Temst, A. Vantomme, J. Dekoster, M. Caymax, R. Loo, O. Nakatsuka, A.
Sakai, and S. Zaima, 218th ECS Meeting, Las Vegas, USA, Oct. 10-15,
2010.
- "Control of Strain Relaxation Behavior of Ge1-xSnx
Layers for Tensile Strained Ge Layers", Y. Shimura, S. Takeuchi, O.
Nakatsuka, and S. Zaima,
218th ECS Meeting, Las Vegas, USA, Oct. 10-15, 2010.
- "Characterization of Local Strain around Through-Silicon Via
Interconnectsby using X-ray Microdiffraction", O. Nakatsuka, H.
Kitada, Y. S. Kim, Y. Mizushima, T. Nakamura, T. Ohba, and S. Zaima,
Advanced Metallization Conference 2010: 20th Asian Session, Tokyo,
Japan, Oct. 9-22, 2010.
- "Formation
of Palladium Silicide Thin Layers on Si (110) Substrates", R. Suryana,
O. Nakatsuka, and S. Zaima, Advanced Metallization Conference 2010:
20th Asian Session, Tokyo, Japan, Oct. 9-22, 2010.
- [Invited] "Tensile-Strained
Ge and Ge1-xSnx Layers for High-Mobility Channels
in Future CMOS Devices",
S. Zaima, O. Nakatsuka, Y. Shimura, S. Takeuchi, International
Conference on Solid-State and Integrated Circuit Technology, Shanghai,
China, Nov. 1- 4, 2010.
- "Study of Ge Surface Passivation using Radical Nitridation
Technique for Ge Channel MOS Transistors", K. Kato, H. Kondo, M.
Sakashita, W. Takeuchi, O. Nakatsuka, S. Zaima, The 1st Korea-Japan
Symposium on Surface Technology, Nov. 26, 2010, Incheon, Korea.
- "Theory of Workfunction Control of Silicides by Doping for Future
Si-Nano-devices based on Fundamental Physics of Why Silicides Exist in
Nature ", T.Nakayama, K. Kakushima, O. Nakatsuka, Y. Machida, S.
Sotome, T. Matsuki, K. Ohmori, H. Iwai, S. Zaima, T. Chikyow, K.
Shiraishi, and K. Yamada, 2010 IEEE International Electron
Devices Meeting, pp. 375-378, San Francisco, USA,Dec. 6-8, 2010.
2009
- [Invited] "Formation and characterization of
tensile-strained Ge layers on Ge1-xSnx buffer layers", S. Zaima, O.
Nakatsuka, Y. Shimura, N. Tsutsui, and A. Sakai, The 6th International
Conference on Silicon Epitaxy and Heterostructures, Los Angeles, USA,
May 17-22, 2009.
- "Low Temperature Growth of Ge1-xSnx Buffer Layers for
Tensile-strained Ge Layers", Y. Shimura, N. Tsutsui, O. Nakatsuka, A.
Sakai, and S. Zaima, The 6th International Conference on Silicon
Epitaxy and Heterostructures, Los Angeles, USA, May 17-22, 2009.
- "Analysis of Local Strain in Ge1-xSnx /Ge/Si(001) Heterostructures by
X-ray Microdiffraction", O. Nakatsuka, Y. Shimura, N. Tsutsui, A.
Sakai, Y. Imai, H. Tajiri, O. Sakata, S. Kimura, and S. Zaima, The 6th
International Conference on Silicon Epitaxy and Heterostructures, Los
Angeles, USA, May 17-22, 2009.
- "Effect of Atomic Deuterium Irradiation on Initial Growth of Sn
and Ge1-xSnx on Ge(001) Substrates", T.
Shinoda, O. Nakatsuka, and S. Zaima, The 6th International Conference
on Silicon Epitaxy and Heterostructures, Los Angeles, USA, May 17-22,
2009.
- "Structural change of direct silicon bonding substrates by
interfacial oxide out-diffusion annealing", T. Kato, T. Ueda, Y. Ohara,
J. Kikkawa, Y. Nakamura, A. Sakai, O. Nakatsuka, S. Zaima, E. Toyoda,
K. Izunome, Y. Imai, S. Kimura, and O. Sakata, The 6th International
Conference on Silicon Epitaxy and Heterostructures, Los Angeles, USA,
May 17-22, 2009.
- "Formation Processes of Ge3N4 films by Radical Nitridation and
their Electrical Properties", K. Kato, H. Kondo, and S. Zaima, The 6th
International Conference on Silicon Epitaxy and Heterostructures, Los
Angeles, USA, May 17-22, 2009.
- [Invited] "Study on Gate Stacks in Future
Nano-Scaled CMOS using Hard X-Ray Photoelectron Spectroscopy", S.
Zaima, O. Nakatsuka, T. Hattori, International Workshop for New
Opportunities in Hard X-ray Photoelectron Spectroscopy (HAXPES 2009),
New York, USA, May 20-22, 2009.
- "Influence of Interfacial Structure on Electrical Properties of
Metal/Ge Schottky Contacts", O. Nakatsuka, S. Akimoto, T. Nishimura and
S. Zaima, The 9th International Workshop on Junction Technology
(IWJT2009), pp. 40-41, Kyoto, Japan, June 11-12, 2009.
- "Formation of Pr Oxide Films by Atomic Layer Deposition using
Pr(EtCp)3 Precursor", H.
Kondo, H. Matsui, K. Furuta, M. Sakashita, and S. Zaima, 2009
International Conference on Solid State Devices and Materials (SSDM),
Sendai, Japan, Oct. 7-9, 2009.
- "Crystalline Structures and Electrical Properties of High
Nitrogen-content Hf-Si-N Films", K. Miyamoto, H. Kondo, and S. Zaima,
2009 International Conference on Solid State Devices and Materials
(SSDM), Sendai, Japan, Oct. 7-9, 2009.
- "Mobility Behavior in Ge1-xSnx Layers Grown on SOI Substrates",
N. Tsutsui, Y. Shimura, O. Nakatsuka, A. Sakai, and S. Zaima, 2009
International Conference on Solid State Devices and Materials (SSDM),
Sendai, Japan, Oct. 7-9, 2009.
- [Invited] " Formation of GeSn Buffer Layers for
High-Speed Strained-Ge Channel MOSFETs", S. Zaima, The 1st
International Workshop on Si based nano-electronics and -photonics,
Vigo, Spain, Sept. 20-23, 2009.
- Keynote Talk: "Technology
Evolution of Silicon", S. Zaima, 216th Electro Chemical Society (ECS)
Meeting, Vienna, Austria, Oct. 4-9, 2009.
- [Invited] "Contact Technology for Nano-Scaled
CMOS", S. Zaima, Advanced Metallization Conference 2009 (ADMETA): 19th
Asian Session, p. 100, Tokyo, Japan, Oct. 20-21, 2009.
- " Formation of Palladium Silicide on Heavily Doped Si (001)
Substrates Using Ti Intermediate Layer", R. Suryana, O. Nakatsuka, and
S. Zaima, Advanced Metallization Conference 2009 (ADMETA): 19th Asian
Session, pp. 58-59, Tokyo, Japan, Oct. 20-21, 2009.
2008
- "Development of high-density radical source for radical
nitridation process in ULSI technology development of high-density
radical source for radical nitridation process in ULSI technology", H.
Kondo, S. Oda, S. Takashima, A. Sakai, M. Ogawa, S. Zaima, M. Hori, S.
Den, and H. Kano, The International Conference on Plasma-NanoTechnology
and Science, Nagoya, Japan, Mar. 13-14, 2008.
- "Characterization and Analyses of Interface Structures in
Directly Bonded Si(011)/Si(001) Substrates", E. Toyoda, A. Sakai, O.
Nakatsuka, S. Zaima, M. Ogawa, H. Isogai, T. Senda, K. Izunome, and K.
Omote, The fourth International SiGe Technology and Device Meeting
(ISTDM), pp. 139-140, HsinChu, Taiwan, May 11-14, 2008.
- "Effect of Hydrogen on Initial Growth of Sn and Ge1-xSnx on Ge(001) substrates", M.
Yamazaki, O. Nakatsuka, T. Shinoda, A. Sakai, M. Ogawa, and S. Zaima,
The fourth International SiGe Technology and Device Meeting (ISTDM),
HsinChu, Taiwan, May 11-14, 2008.
- "Novel Method to Introduce Uniaxial Tensile Strain in Ge by
Microfabrication of Ge/Si1-xGex Structures on Si(001)
Substrates", T. Mizutani, O. Nakatsuka, A. Sakai, H. Kondo, M. Ogawa,
and S. Zaima, The fourth International SiGe Technology and Device
Meeting (ISTDM), pp. 149-150, HsinChu, Taiwan, May 11-14, 2008.
- "Microstructures in Directly Bonded Si Substrates", A. Sakai, Y.
Ohara, T. Ueda, O. Nakatsuka, M. Ogawa, S. Zaima, E. Toyoda, The fourth
International SiGe Technology and Device Meeting (ISTDM), pp. 153-154,
HsinChu, Taiwan, May 11-14, 2008.
- "Thermal Stability and Scalability of Mictamict Ti-Si-N MOS Gate
Electrodes", H. Kondo, K. Furumai, M. Sakashita, A. Sakai, M. Ogawa,
and S. Zaima, 2008 International Conference on Solid State Devices and
Materials (SSDM), Tsukuba, Japan, Sept. 24-26, 2008.
- "Metalorganic Chemical Vapor Deposition of
High-Dielectric-Constant Praseodymium Oxide Films using a Liquid
Cyclopentadienyl Precursor", H. Kondo, S. Sakurai, A. Sakai, M. Ogawa
and S. Zaima 2008 International Conference on Solid State Devices and
Materials (SSDM), Tsukuba, Japan, Sept. 24-26, 2008.
- "Control of Sn Precipitation and Strain relaxation in
Compositionally Step-graded Ge1-xSnx Buffer Layers for
Tensile-strained Ge Layers", Y. Shimura, N. Tsutsui, O. Nakatsuka, A.
Sakai, and S. Zaima, 2008 International Conference on Solid State
Devices and Materials (SSDM), Tsukuba, Japan, Sept. 24-26, 2008.
- "Analysis of Uniaxial Tensile Strain in Microfabricated Ge/Si1-x Gex Structures on Si(001)
Substrates", T. Mizutani, O. Nakatsuka, A. Sakai, H. Kondo, and S.
Zaima, 4th International WorkShop on New Group IV Semiconductor
Nanoelectronics, pp. 19-20 Sendai, Japan, Sept. 25-27, 2008.
- "Formation and Characterization of Compositionally Step-graded Ge1-x Snx Buffer Layers for
Tensile-strained Ge Layers", Y. Shimura, N. Tsutsui, O. Nakatsuka, A.
Sakai, and S. Zaima, 4th International WorkShop on New Group IV
Semiconductor Nanoelectronics, pp. 27-28, Sendai, Japan, Sept. 25-27,
2008.
- "Formation of Tensile-Strained Ge Layers on Ge1-xSnx Buffer Layers and Control of Strain and
Dislocation Structures", O. Nakatsuka, Y. Shimura, A. Sakai, and S.
Zaima, 4th International WorkShop on New Group IV Semiconductor
Nanoelectronics, pp. 63-64, Sendai, Japan, Sept. 25-27, 2008.
- "Crystalline and Electrical Properties of Thin Pd Silicide
Layer/Si Contacts", R. Suryana, S. Akimoto, O. Nakatsuka and S. Zaima,
Advanced Metallization Conference 2008 (ADMETA): 18th Asian Session,
Tokyo, Japan, Oct. 8-10, 2008.
- "Nitrogen Content Dependence of Resistivity and Crystalline
Structures of Ti-Si-N and Hf-Si-N Gate Electrodes", K. Miyamoto, K.
Furumai, B.E. Urban, H. Kondo, and S. Zaima, The 2008 International
Workshop on Dielectric Thin Films for Future ULSI Devices: Science and
Technology (IWDTF), pp. 43-44, Tokyo, Japan, Nov. 5-7, 2008.
- "Effects of ALD-Al2O3 Interface Layers on
Interfacial Properties of Ge MOS Capacitors", R. Kato, S. Kyogoku, M.
Sakashita, H. Kondo, and S. Zaima, The 2008 International Workshop on
Dielectric Thin Films for Future ULSI Devices: Science and Technology
(IWDTF), pp. 105-106, Tokyo, Japan, Nov. 5-7, 2008.
- "Characterization and analyses of interface structures in
directly bonded Si(011)/Si(001) substrates", E. Toyoda, A. Sakai, O.
Nakatsuka, H. Isogai, T. Senda, K. Izunome, K. Omote, and S. Zaima, The
5th International Symposium on Advanced Science and Technology of
Silicon Materials, Hawaii, USA, Nov. 10-14, 2008.
- "Formation of Uniaxial Tensile-strained Ge by using
Micro-patterning of Ge/Si1-xGex/Si Structures", T. Mizutani, O.
Nakatsuka, A. Sakai, H. Kondo, and S. Zaima, The IUMRS International
Conference in Asia 2008 (IUMRS-ICA 2008), Nagoya, Japan, Dec. 9-13,
2008.
- "Formation and Characterization of Tensile-strained Ge layers on
Ge1-xSnx Buffer Layers", Y. Shimura, N.
Tsutsui, O. Nakatsuka, A. Sakai, and S. Zaima, The IUMRS International
Conference in Asia 2008 (IUMRS-ICA 2008), Nagoya, Japan, Dec. 9-13,
2008.
- "Strain and interfacial defects in directly bonded Si
substrates", Y. Ohara, T. Ueda, A. Sakai, O. Nakatsuka, S. Zaima, E.
Toyoda, K. Izunome, H. Tajiri, O. Sakata and S. Kimura, The IUMRS
International Conference in Asia 2008 (IUMRS-ICA 2008), Nagoya, Japan,
Dec. 9-13, 2008.
- "Atomistic analysis of directly bonded Si substrate interface",
T. Ueda, Y. Ohara, A. Sakai, O. Nakatsuka, S. Zaima, E. Toyoda, K.
Izunome, T. Sakata, and H. Mori, The IUMRS International Conference in
Asia 2008 (IUMRS-ICA 2008), Nagoya, Japan, Dec. 9-13, 2008.
2007
- [Invited] "Strain and dislocations in group IV
semiconductor heterostructures", A. Sakai, O. Nakatsuka, M. Ogawa, and
S. Zaima, Materials Research Society 2007 Spring Meeting, San
Francisco, USA, Apr. 9-13, 2007.
- "Characterization of bonding structures of directly bonded hybrid
crystal orientation substrates", E. Toyoda, A. Sakai, H. Isogai, T.
Senda, K. Izunome, O. Nakatsuka, M. Ogawa, and S. Zaima, 5th
International Conference on Silicon Epitaxy and Heterostructures, pp.
337-338, Marseille, France, May 20-25, 2007.
- "Formation of high-density Si nanodots by agglomeration of
ultra-thin amorphous Si films", H. Kondo, T. Ueyama, E. Ikenaga, K.
Kobayashi, A. Sakai, M. Ogawa, and S. Zaima, 5th International
Conference on Silicon Epitaxy and Heterostructures, pp. 305-306,
Marseille, France, May 20-25, 2007.
- [Invited] "Silicide and germanide technology for
contacts and gates in MOSFET applications", S. Zaima, 5th International
Conference on Silicon Epitaxy and Heterostructures, pp. 71-72,
Marseille, France, May 20-25, 2007.
- "Tensile strained Ge layers on strain-relaxed Ge1-xSnx/virtual
Ge substrates", S. Takeuchi, A. Sakai, O. Nakatsuka, M. Ogawa, and S.
Zaima, 5th International Conference on Silicon Epitaxy and
Heterostructures, pp. 36-37, Marseille, France, May 20-25, 2007.
- "Impact of Pt Incorporation on Thermal Stability of NiGe Layers
on Ge(001) Substrates", O. Nakatsuka, A. Suzuki, A. Sakai, M. Ogawa,
and S. Zaima, 7th International Workshop on Junction Technology 2007,
pp. 87-88, Kyoto, Japan, June 8-9, 2007.
- "Development of new high-density radical sources and its
application to radical nitridation of Ge surfaces", H. Kondo, S. Oda,
S. Takashima, A. Sakai, M. Ogawa, S. Zaima, M. Hori, S. Den, H. Kano,
The 20th Symposium on Plasma Science for Materials, p. 128, Nagoya,
Japan, June 21-22, 2007.
- "Pr-Oxide-Based Dielectric Films on Ge Substrates", M.
Sakashita, N. Kito, A. Sakai, H. Kondo, O. Nakatsuka, M. Ogawa and S.
Zaima, 2007 International Conference on Solid State Devices and
Materials, Tsukuba, Japan, Sept. 18-21, 2007.
- "Crystalline and electrical properties of mictamict TiSiN gate
MOS capacitors", K. Furumai, H. Kondo, M. Sakashita, A. Sakai, M. Ogawa
and S. Zaima, 2007 International Conference on Solid State Devices and
Materials, Tsukuba, Japan, Sept. 18-21, 2007.
- "Surface Treatment of Ge(001) Surface by Radical Nitridation", H.
Kondo, M. Fujita, A. Sakai, M. Ogawa and S. Zaima, 2007 International
Conference on Solid State Devices and Materials, Tsukuba, Japan, Sept.
18-21, 2007.
- "Dependence of Electrical
Characteristics on Interfacial Structures of Epitaxial NiSi2/Si
Schottky Contacts Formed from Ni/Ti/Si System", O. Nakatsuka, A.
Suzuki, S. Akimoto, A. Sakai, M. Ogawa and S. Zaima, 2007 International
Conference on Solid State Devices and Materials, Tsukuba, Japan, Sept.
18-21, 2007.
- [Invited] "Silicide and Germanide Technology for
Contacts and Metal Gates in MOSFET Applications", S. Zaima, O.
Nakatsuka, H. Kondo, M. Sakashita, A. Sakai, and M. Ogawa, 212th
Electrochemical Society Meeting, Washington D.C., USA, Oct. 7-12, 2007.
- "Contact Propeties of Epitaxial NiSi2/Heavily Doped Si Structures
Formed from Ni/Ti/Si Systems", S. Akimoto, O. Nakatsuka, A. Suzuki, A.
Sakai, M. Ogawa, and S. Zaima, Advanced Metallization Conference 2007:
17th Asian Session, pp. 90-91, Tokyo, Japan, Oct. 23-24, 2007.
- "Structural and Electrical Properties of Metal-germanide MOS Gate
Electrodes", H. Kondo, D. Ikeno, Y. Kaneko, M. Sakashita, A. Sakai, M.
Ogawa, and S. Zaima, The Sixth Pacific Rim Inernational Conference on
Advanced Materials and Processing, p. 26, Jeju, Korea, Nov. 5-9, 2007.
- "Electrical and Crystalline Properties of Epitaxial NiSi2/Si Contacts Fromed in
Ni/Ti/Si(001) Systems", O. Nakatsuka, A. Suzuki, S. Akimoto, A. Sakai,
M. Ogawa, and S. Zaima, The Sixth Pacific Rim Inernational Conference
on Advanced Materials and Processing, p. 72, Jeju, Korea, Nov. 5-9,
2007.
- "Tensile Strained Ge Layers Grown on Compositionally Step-Graded
Ge1-xSnx Buffer Layers", Y. Shimura, S. Takeuchi,
A. Sakai, O. Nakatsuka, M. Ogawa, and S. Zaima, The 3nd international
workshop on new group IV semiconductor nanoelectronics, pp. 29-30,
Sendai, Japan, Nov. 8-9, 2007.
- [Invited] "Growth and Characterization of
Tensile-Strained Ge Layers on Strain Relaxed Ge1-xSnx
Buffer Layers", O. Nakatsuka, S. Takeuchi, A. Sakai, M. Ogawa, and S.
Zaima, The 3nd international workshop on new group IV semiconductor
nanoelectronics, pp. 75-76, Sendai, Japan, Nov. 8-9, 2007.
- [Invited] "Defect Control for Ge/Si and Ge1-xSnx/Ge/Si
Heterostructures", A. Sakai, S. Takeuchi, O. Nakatsuka, M. Ogawa, and
S. Zaima, Fifth International Symposium on Control of Semiconductor
Interfaces, pp. 31-32, Tokyo, Japan, , Nov. 12-14, 2007.
- "Characterization of Local Strains in Si1-xGex Hetero-mesa Structures on
Si(001) Substrates by Using X-ray Microdiffraction", O. Nakatsuka, K.
Yukawa, S. Mochizuki, A. Sakai, K. Fukuda, S. Kimura, O. Sakata, K.
Izunome, T. Senda, E. Toyoda, M. Ogawa, and S. Zaima, Fifth
International Symposium on Control of Semiconductor Interfaces, pp.
41-42, Tokyo, Japan, Nov. 12-14, 2007.
- "Scanning Tunneling Microscopy Observation of Initial Growth of
Sn and Ge1-xSnx Layers on Ge(001) Substrates",
M. Yamazaki, S. Takeuchi, O. Nakatsuka, A. Sakai, M. Ogawa, and S.
Zaima, Fifth International Symposium on Control of Semiconductor
Interfaces, pp. 85-86, Tokyo, Japan, Nov. 12-14, 2007.
- "Effect of alcohol sources on synthesis of single-walled carbon
nanotubes", S. Oida, A. Sakai, O. Nakatuska, M. Ogawa, and S.
Zaima, 9th International Conference on Atomically Controlled
Surfaces, Interfaces and Nanostructures, Tokyo, Japan, Nov. 11-15,
2007.
- "Formation of high-density Si nanodots and characterization of
chemical bonding states by soft-X-ray photoelectron spectroscopy", H.
Kondo, 9th International Conference on Atomically Controlled Surfaces,
Interfaces and Nanostructures, Tokyo, Japan, Nov. 11-15, 2007.
- [Invited] "Controlling Interface Properties of
Silicide/Si Contacts for Si ULSI Applications", S. Zaima, O. Nakatsuka,
A. Sakai, and M. Ogawa, 9th International Conference on Atomically
Controlled Surfaces, Interfaces and Nanostructures, Tokyo, Japan, Nov.
11-15, 2007.
2006
- "Electrical properties of epitaxial NiSi2/Si contacts
with extremely flat interface formed in Ni/Ti/Si(001) system", O.
Nakatsuka, A. Suzuki, A. Sakai, M. Ogawa, and S. Zaima, Materials for
Advanced Metallization Conference 2006, pp. 177-178, Grenoble, Frence,
Mar. 5-8, 2006.
- "Systematic Characterization of Ni Full Silicide in Sub-100 nm
Gate Regions", D. Ito, A. Sakai, O. Nakatsuka, H. Kondo, Y. Akasaka, M.
Ogawa, and S. Zaima, 2006 MRS Spring Meeting, San Francisco, USA, Apr.
17-21, 2006.
- [Invited] "Control and
characterization of strain in SiGe/Si heterostructures with engineered
misfit dislocations", A. Sakai, N. Taoka, S. Mochizuki, K. Yukawa, O.
Nakatsuka, S. Takeda, S. Kimura, M. Ogawa, and S. Zaima, The third
International SiGe Technology and Device Meeting, pp. 232-233,
Princeton, USA, May 15-17, 2006.
- "Strain
relaxation of patterned Ge and SiGe structures on Si(001) substrates",
S. Mochizuki, A. Sakai, O. Nakatsuka, H. Kondo, K. Yukawa,
K. Izunome, T. Senda, E. Toyoda, M. Ogawa, and S. Zaima, The third
International SiGe Technology and Device Meeting, pp. 258-259,
Princeton, USA, May 15-17, 2006.
- "Growth and structure evaluation of strain-relaxed Ge1-xSnx
buffer layers on virtual Ge(001) substrates", S. Takeuchi, A. Sakai, K.
Yamamoto, O. Nakatsuka, M. Ogawa, and S. Zaima, The third International
SiGe Technology and Device Meeting, pp. 98-99, Princeton, USA, May
15-17, 2006.
- [Invited] "Nano-scale
Observations for Local Current Leakage in High-k Gate Dielectrics Using
Conductive-Atomic Force Microscopy", S. Zaima, A. Seko, T. Sago,
M.
Sakashita, A. Sakai, and M. Ogawa, The European Materials Research Society 2006 Spring Meeting
(E-MRS - IUMRS - ICEM 06), Nice, France, May 29-June 2, 2006.
- Keynote Lecture: "Silicides and
Related-Materials for ULSI Applications", S. Zaima, A. Sakai, and
M. Ogawa, Asia-Pacific Conference on Semiconducting Silicides: Science
and Technology Towards Substainable Optoelectronics, pp. 1-2, Kyoto,
Japan, July 29-31, 2006.
- Invited lecture:
"Nano-scale Observations for degradation phenomena in High-k gate
dielectrics using conductive-atomic force microscopy", S. Zaima, A.
Seko, M. Sakashita, A. Sakai and M. Ogawa, The IUMRS International
Conference in Asia 2006 , Sept. 10-14, 2006, Jeju, Korea.
- "Behavior of Local Charge Trapping Sites in La2O3-Al2O3
Comosite Films under Constant Voltage Stress", T. Sago, A. Seko, M.
Sakashita, A. Sakai, M. Ogawa, and S. Zaima, 2006 International
Conference on Solid State Devices and Materials, pp. 418-419, Sept.
12-15, 2006, Yokohama, Japan.
- "Comparison Dependence of Work Function in Metal (Ni,
Pt)-Germanide Gate Electrodes", D. Ikeno, K. Furumai, H. Kondo, M.
Sakashita, A. Sakai, M. Ogawa, and S. Zaima, 2006 International
Conference on Solid State Devices and Materials, pp. 442-443, Sept.
12-15, 2006, Yokohama, Japan.
- [Invited] "Hard X-ray Photoelectron Spectroscopy
Study on Buried Interfaces in Next Generation CMOS Devices", T. Hattori
and S. Zaima, The 2nd International Workshop on Hard X-ray
Photoelectron Spectroscopy, p. 20, Sept. 19-20, 2006, Hyogo, Japan.
- "Interfacial Structure of HfON/SiN/Si Gate Stacks", O.
Nakatsuka, M. Sakashita, H. Kondo, E. Ikenaga, M. Kobata, J.-J. Kim, H.
Nohira, T. Hattori, A. Sakai, M. Ogawa, S. Zaima, The 2nd International
Workshop on Hard X-ray Photoelectron Spectroscopy, p. 102, Sept. 19-20,
2006, Hyogo, Japan.
- "Dislocation Structure and Strain Relaxation of SiGe and Ge
Sub-micron Stripe Lines on Si(001) Substrates", O. Nakatsuka, S.
Mochizuki, A. Sakai, H. Kondo, K. Yukawa, M. Ogawa, and S. Zaima, The
2nd International WorkShop on New Group IV Semiconductor
Nanoelectronics, pp. 69-70, Oct. 2-3, 2006, Sendai, Japan.
- "Mosaicity and Dislocations in Strain-Relaxed SiGe Buffer Layers
on SOI Substrates", O. Nakatsuka, N. Taoka, A. Sakai, S. Mochizuki, M.
Ogawa, and S. Zaima, The 2nd International WorkShop on New Group IV
Semiconductor Nanoelectronics, pp. 71-72, Oct. 2-3, 2006, Sendai, Japan.
- [Invited] "Buffer layer
technology with misfit dislocation engineering", A. Sakai, O.
Nakatsuka,
M. Ogawa, and S. Zaima, The 2nd International WorkShop on New Group IV
Semiconductor Nanoelectronics, pp. 81-82, Oct. 2-3, 2006, Sendai,
Japan.
- "Control of Strain and Dislication Structures in Ge1-xSnx
buffer layers on virtual Ge substrates", S. Takeuchi, A. Sakai, K.
Yamamoto, O. Nakatsuka, M. Ogawa, and S. Zaima, The 2nd International
WorkShop on New Group IV Semiconductor Nanoelectronics, pp. 91-92, Oct.
2-3, 2006, Sendai, Japan.
- [Invited] "Ni-Silicide/Si
and SiGe(C) Contact Technology for ULSI Applications", O. Nakastuka, S.
Zaima, A. Sakai, and M. Ogawa, The 14th annual IEEE International
Conference on Advanced Thermal Processing of Semiconductors, pp. 31-37,
Oct. 10-13, 2006, Kyoto, Japan.
- "Electrical Properties and Bonding Structures of Germanium
Nitride/Ge(100) Structures Formed by Radical Nitridation", H. Kondo, I.
Yanagi, M. Sakashita (Graduate School of Engineering, Nagoya
university), A. Sakai, M. Ogawa, and S. Zaima, 210th Meeting of The
Electrochemical Society, Oct. 29-Nov. 3, 2006, Cancun, Mexico.
- "Scanning Tunneling Microscopy Study on the Reaction of Oxygen
with Clean Ge(001) Surfaces", A. Sakai, Y. Wakazono, O. Nakatsuka, S.
Zaima, and M. Ogawa, 210th Meeting of The Electrochemical Society, Oct.
29-Nov. 3, 2006, Cancun, Mexico.
- "Evaluation of Trapped Charge Distributions in Stressed Gate SiO2
Films using Conductive Atomic Force Microscopy", A. Seko, Y. Watanabe,
M. Sakashita, A. Sakai, M. Ogawa, and S. Zaima, The 2006 International
Workshop on Dielectric Thin Films for Future ULSI Devices: Science and
Technology, pp. 23-24, Nov. 8-10, 2006, Kanagawa, Japan.
2005
- "Transmission electron microscopy analysis of dislocation
structures in the strain-relaxed SiGe films on Si and
silicon-on-insulator substrates", N. Taoka, A. Sakai, S. Mochizuki, O.
Nakatsuka, M. Ogawa, S. Zaima, and Y. Yasuda, International Symposium
on
Characterization of Real Materials and Real Processing by Transmission
Electron Microscopy, Nagoya, Japan, Jan. 26-27, 2005.
- "Improvement on NiSi/Si contact properties with C-implantation",
S. Zaima, O. Nakatsuka, K. Okubo, A. Sakai, M. Ogawa, and Y. Yasuda,
Materials for Advanced Metallization Conference 2005, pp. 143-144,
Dresden, Germany, Mar. 6-9, 2005.
- Plenary lecture:"Nitrogen
radical surface reactions and advanced ULSI device processing", S.
Zaima, Korea-Japan Workshop on Advanced Plasma Processing and
Diagnostics, Busan, Korea, Apr. 22-23, 2005.
- "Control of Misfit Dislocations in Strain-Relaxed SiGe Buffer
Layers on SOI Substrates", N. Taoka, A. Sakai, S. Mochizuki, O.
Nakatsuka, M. Ogawa, and S. Zaima, Fourth International Conference on
Silicon Epitaxy and Heterostructures, pp. 120-121, Awaji Island, Japan,
May 23-26, 2005.
- "Local Strain in SiGe/Si Heterostructures Analyzed by X-Ray
Microdiffraction", S. Mochizuki, A. Sakai, N. Taoka, O. Nakatsuka, S.
Takeda, S. Kimura, M. Ogawa, and S. Zaima, Fourth International
Conference on Silicon Epitaxy and Heterostructures, pp. 124-125, Awaji
Island, Japan, May 23-26, 2005.
- "Hard X-Ray Photoelectron Spectroscopy for HfON/SiN/Si System",
O. Nakatsuka, R. Takahishi, M. Sakashita, E. Ikenaga, K. Kobayashi, H.
Nohira, T. Hattori, A. Sakai, M. Ogawa, and S. Zaima, Fourth
International Conference on Silicon Epitaxy and Heterostructures, pp.
270-271, Awaji Island, Japan, May 23-26, 2005.
- "Surface structures in the initial growth of epitaxial Si1-x-yGexCy
layers in SiGe and C alternate deposition", S. Takeuchi, O. Nakatsuka,
Y. Wakazono, A. Sakai, M. Ogawa, Y. Yasuda, and S. Zaima, First
International WorkShop on New Group IV Semiconductor Nanoelectronics,
pp. 33-34, Sendai, Japan, May 27-28, 2005.
- "Control of Solid-Phase Reaction and Electrical Properties of Ni
silicide/Si Contacts by Ge and C Incorporation", O. Nakatsuka, K.
Okubo,
A. Sakai, J. Murota, Y. Yasuda, M. Ogawa, and S. Zaima, First
International WorkShop on New Group IV Semiconductor Nanoelectronics,
pp. 35-36, Sendai, Japan, May 27-28, 2005.
- "Impact of C implantation on electrical properties of NiSi/Si
contact", O. Nakatsuka, K. Okubo, A. Sakai, M. Ogawa, and S. Zaima, The
5th International Workshop on Junction Technology, pp. 91-92, Osaka,
Japan, June 7-8, 2005.
- [Invited] "Nanoscale Observations for
Degradation Phenomena in SiO2 and High-k Gate Insulators
Using
Conductive-Atomic Force Microscopy", S. Zaima, A. Seko, Y. Watanabe, T.
Sago, M. Sakashita, H. Kondo, A. Sakai, and M. Ogawa, 2005
International
Conference on Solid State Devices and Materials, pp. 236-237, Sept.
12-15, 2005, Kobe, Japan.
- "Local Current Leakage Characterization in La2O3-Al2O3
Composite Films by Conductive Atomic Force Microscopy", A. Seko, T.
Sago, M. Sakashita, A. Sakai, M. Ogawa, and S. Zaima, 2005
International
Conference on Solid State Devices and Materials, pp. 246-247, Sept.
12-15, 2005, Kobe, Japan.
- "Film structures and electrical properties of Pr silicate formed
by pulsed laser deposition", K. Ariyoshi, M. Sakashita, A. Sakai, M.
Ogawa, and S. Zaima, 2005 International Conference on Solid State
Devices and Materials, pp. 256-257, Sept. 12-15, 2005, Kobe, Japan.
- [Invited] "Dislocation and
strain engineering for SiGe buffer layers on Si", A. Sakai, S.
Mochizuki, N. Taoka, O. Nakatsuka, S. Takeda, S. Kimura, M. Ogawa, and
S. Zaima, Symposium on Crystalline Defects and Contamination: Their
Impact and Control in Device Manufacturing IV (joint with 35th European
Solid State Device Research Conference), Grenoble, Frence, Sept. 15-16,
2005.
- "Epitaxial NiSi2 layers with extremely flat interfaces
in Ni/Ti/Si(001) system", A. Suzuki, K. Okubo, O. Nakatsuka, A. Sakai,
M. Ogawa, and S. Zaima, Advanced Metallization Conference 2005: 15th
Asian Session, Tokyo, Japan, Oct. 13-14, 2005.
2004
- "Growth mechanism of epitaxial NiSi2 layer in the
Ni/Ti/Si(001) contact for atomically flat interfaces", O. Nakatsuka, K.
Okubo, A. Sakai, S. Zaima, and Y. Yasuda, in Abstr. of The 4th
International Workshop on Junction Technology, Shanghai, China, Mar.
15-16, 2004.
- [Invited]"Current Status
and Future Prospects of Si-ULSI Technology", S. Zaima, The 1st Workshop
for Joint Program Japan-US Research Collaboration for Synchrotron
Radiation Nanomaterials Science, Tokyo, Japan, Mar. 16-17, 2004.
- "Initial growth behaviors of SiGeC in SiGe and C alternative
deposition", S. Takeuchi, O. Nakatsuka, Y. Wakazono, A. Sakai, S.
Zaima,
and Y. Yasuda, Second International SiGe Technology and Device Meeting,
pp. 192-193, Frankfurt (Oder), Germany, 16-19 May, 2004.
- "Growth and characterization of strain-relaxed SiGe buffer layers
on Si(001) substrates with pure-edge misfit dislocations", N. Taoka, A.
Sakai, T. Egawa, O. Nakatsuka, S. Zaima, and Y. Yasuda, Second
International SiGe Technology and Device Meeting, pp. 43-44, Frankfurt
(Oder), Germany, May 16-19, 2004.
- "Thickness Dependence of Microscopic Current-Voltage
Characteristics in Stressed SiO2 Films", Y. Watanabe, A.
Seko,
H. Kondo, A. Sakai, S. Zaima, and Y. Yasuda, 2004 International
Workshop
on Dielectric Thin Films for Future ULSI Devices, Tokyo, Japan, 26-28
May, 2004.
- "HfO2 Dielectric Film Formation Combined with Radical
Nitridation",M. Sakashita, R. Takahashi, A. Sakai, S. Zaima, and Y.
Yasuda, 2004 International Workshop on Dielectric Thin Films for Future
ULSI Devices, Tokyo, Japan, May 26-28, 2004.
- "Analysis of Breakdown Phenomena in Stressed Gate SiO2
Films by Conductive Atomic Force Microscopy", A. Seko, Y. Watanabe, H.
Kondo, A. Sakai, S. Zaima, and Y. Yasuda, 2004 International Workshop
on
Dielectric Thin Films for Future ULSI Devices, Tokyo, Japan, 26-28 May,
2004.
- "Growth Process and Energy Bandgap Formation of Silicon Nitride
Films in Radical Nitridation Process", H. Kondo, K. Kawaai, A. Sakai,
K.
Miyazaki, S. Zaima, and Y. Yasuda, 2004 International Workshop on
Dielectric Thin Films for Future ULSI Devices, Tokyo, Japan, 26-28 May,
2004.
- [Invited]"Growth of
strain-relaxed SiGe buffer layers on Si(001) substrates with controlled
generation and propagation of dislocations", A. Sakai, S. Zaima, and Y.
Yasuda, Materials Research Society 2004 Spring Meeting, San Francisco,
USA, April 12-16, 2004.
- [Invited] "Nanoscale
analysis of degradation phenomena in MOS gate insulators using
conductive atomic force microscopy", S. Zaima, H. Kondo, M. Sakashita,
A. Sakai, and Y. Yasuda, The 12th International Conference on Solid
Films and Surfaces, p. 8, Hamamatsu, Japan, 21-25 Jun., 2004.
- "Thermal Stability and Electrical Properties of (La2O3)1-x(Al2O3)x
Composite Films", R. Fujitsuka, M. Sakashita, A. Sakai, S. Zaima, and
Y.
Yasuda, 2004 International Conference on Solid State Device and
Materials, pp. 528-529, Tokyo, Japan, 15-17 Sep., 2004.
- "Growth and Dislocation Control of Strain-relaxed SiGe Buffer
Layers on Si(100) Substrates", Y. Yasuda, The Seventh China-Japan
Symposium on Thin Films, pp. 33-36, Chengdu, China, 20-22 Sep., 2004.
- "Nickel Silicide Technology for Low Resistivity Contacts in ULSI
Devices", S. Zaima, O. Nakatsuka, A. Sakai, and Y. Yasuda, The Seventh
China-Japan Symposium on Thin Films, pp. 151-154, Chengdu, China, 20-22
Sep., 2004.
- "Thermal stability and electrical properties of Ni-silicide on
C-incorporation", O. Nakatsuka, K. Okubo, A. Sakai, M. Ogawa, S. Zaima,
J. Murota, and Y. Yasuda, Advanced Metallization Conference 2004: Asian
Session, pp. 18-19, Tokyo, Japan, 28-29 Sep., 2004.
- [Invited] "Group-IV
Semiconductor Materials Engineering for Advanced Device Technology", Y.
Yasuda, A. Sakai, O. Nakatsuka, and S. Zaima, 2004 Joint International
Meeting: 206 th Meeting of The Electrochemical Society (ECS) and 2004
Fall Meeting of The Electrochemical Society of Japan (ECSJ), Honolulu,
USA, 3-8 Oct., 2004.
- "Preparation and Evaluation of NiGe Gate Electrodes for
Metal-Oxide-Semiconductor Devices", Y. Kaneko, H. Kondo, A. Sakai, S.
Zaima, and Y. Yasuda, 2004 Joint International Meeting: 206 th Meeting
of The Electrochemical Society (ECS) and 2004 Fall Meeting of The
Electrochemical Society of Japan (ECSJ), Honolulu, USA, Oct. 3-8, 2004.
- "Improvement in the Ni silicide/Si contact properties by C
implantation", K. Okubo, O. Nakatsuka, A. Sakai, M. Ogawa, S. Zaima, J.
Murota and Y. Yasuda, Third International Workshop on New Group IV
(Si-Ge-C) Semiconductors: Control of Properties and Application to
Ultrahigh Speed and Opto-Electronic Devices, pp. 43-44, Sendai, Japan,
Oct. 12-13, 2004.
- "Control of initial growth of epitaxial NiSi2 on
Si(001) with C incorporation", O. Nakatsuka, E. Okada, D. Ito, A.
Sakai,
S.Zaima, M. Ogawa, and Y. Yasuda, Third International Workshop on New
Group IV (Si-Ge-C) Semiconductors: Control of Properties and
Application
to Ultrahigh Speed and Opto-Electronic Devices, pp. 41-42, Sendai,
Japan, Oct. 12-13, 2004.
- "Analysis of microstructures in strain-relaxed SiGe buffer layers
on SOI substrates with pure-edge dislocation networks", N. Taoka, A.
Sakai, S. Mochizuki, O. Nakatsuka, S. Zaima, M. Ogawa, Y. Yasuda, T.
Tezuka, N. Sugiyama, and S. Takagi, Third International Workshop on New
Group IV (Si-Ge-C) Semiconductors: Control of Properties and
Application
to Ultrahigh Speed and Opto-Electronic Devices, pp. 39-40, Sendai,
Japan, Oct. 12-13, 2004.
- "Anisotropic strain-relaxation mechanism in SiGe/Si(001)
heterostructures with 60deg. misfit dislocations", S. Mochizuki, T.
Egawa, A. Sakai, N. Taoka, O. Nakatsuka, M. Ogawa, S. Zaima, and Y.
Yasuda, Third International Workshop on New Group IV (Si-Ge-C)
Semiconductors: Control of Properties and Application to Ultrahigh
Speed
and Opto-Electronic Devices, pp. 35-36, Sendai, Japan, Oct. 12-13, 2004.
- "Evolution of surface morphology in the initial growth of Si1-x-yGexCy
layers", S. Takeuchi, O. Nakatsuka, Y. Wakazono, A. Sakai, M. Ogawa, S.
Zaima, and Y. Yasuda, Third International Workshop on New Group IV
(Si-Ge-C) Semiconductors: Control of Properties and Application to
Ultrahigh Speed and Opto-Electronic Devices, pp. 33-34, Sendai, Japan,
Oct. 12-13, 2004.
- "Scanning tunneling microscopy observation of C adsorption
behavior in the initial growth of SiGeC on Si(001)", Y. Wakazono, S.
Takeuchi, O. Nakatsuka, A. Sakai, S. Zaima, M. Ogawa, and Y. Yasuda,
Third International Workshop on New Group IV (Si-Ge-C) Semiconductors:
Control of Properties and Application to Ultrahigh Speed and
Opto-Electronic Devices, pp. 31-32,Sendai, Japan, Oct. 12-13, 2004.
- "Fabrication and evaluation of floating gate memories with
surface-nitrided Si nanocrystals", S. Naito, T. Ueyama, H. Kondo, M.
Sakashita, A. Sakai, M. Ogawa, and S. Zaima, 2004 International
Microprocesses and Nanotechnology Conference, pp. 170-171, Osaka,
Japan,
Oct. 26-29, 2004.
- [Invited]"Control of Ni/Si
interfacial reaction and NiSi technology for ULSI applications", S.
Zaima, O. Nakatsuka, A. Sakai, and Y. Yasuda, The International Union
of
Material Research Society- International Conference in Asian 2004, p.
205, Hsinchu, Taiwan, Nov. 16-18, 2004.
- "Dislocation engineering for high-quality SiGe epitaxial films on
Si substrates", A. Sakai, S. Zaima, and Y. Yasuda, The 4th
International
Symposium on Advanced Science and Technology of Silicon Materials, pp.
245-250, Hawaii, USA, Nov. 24-26, 2004.
- "Dislocation and strain distribution analysis for SiGe buffer
layers formed on silicon on insulator substrates", N. Taoka, A. Sakai,
S. Mochizuki, O. Nakatsuka, S. Zaima, Y. Yasuda, M.Ogawa, T. Tezuka, N.
Sugiyama, and S. Takagi, 2004 Materials Research Society Fall Meeting,
Boston, USA, Nov. 29-Dec. 3, 2004.
2003
- [Invited]"Interfacial
reaction and electrical properties in Ni/Si and Ni/SiGe contacts", S.
Zaima, O. Nakatsuka, A. Sakai, J. Murota, and Y. Yasuda, First
International SiGe Technology and Device Meeting, pp. 107-108, Nagoya,
Japan, Jan. 15-17, 2003.
- "Strain-relaxation mechanisms of SiGe layers formed by two-step
growth on Si(100)", T. Egawa, T. Yamamoto, N. Taoka, O. Nakatsuka, A.
Sakai, S. Zaima, and Y. Yasuda, First International SiGe Technology and
Device Meeting, pp. 135-136, Nagoya, Japan, Jan. 15-17, 2003.
- "Dislocation structures and strain-relaxation in SiGe buffer
layers on Si (001) with thin Ge interlayer", T. Yamamoto, T. Egawa, N.
Taoka, O. Nakatsuka, A. Sakai, S. Zaima, and Y. Yasuda, First
International SiGe Technology and Device Meeting, pp. 137-138, Nagoya,
Japan, Jan. 15-17, 2003.
- "Influence of SiGe interlayer on the initial growth of Si1-x-yGexCy
on Si(100)", S. Ariyoshi, S. Takeuchi, O. Nakatsuka, A. Sakai, S.
Zaima,
and Y. Yasuda, First International SiGe Technology and Device Meeting,
pp. 141-142, Nagoya, Japan, Jan.15-17, 2003.
- "Solid phase growth of nickel silicide for low resistance
contacts in Si and SiGe(C) devices", S. Zaima, Y. Tsuchiya, K. Okubo,
O.
Nakatsuka, A. Sakai, J. Murota, and Y. Yasuda, 3rd International
SiGe(C)
Epitaxy and Heterostructures Conference, pp. 74-75, Santa Fe, USA, Mar.
9-12, 2003.
- [Invited]"Atomistic
Characterization of Radical Nitridation Process on Si(100) Surfaces",
Y.
Yasuda, A. Sakai, and S. Zaima, in Abstr. of Symposium on Silicon
Nitride and Silicon Dioxide Thin Insulating Films, Paris, France, Apr.
28-May. 2, 2003.
- J. Yamasaki, N. Tanaka, O.Nakatsuka, A. Sakai, S. Zaima, and Y.
Yasuda, "HRTEM and EELS Analysis of Interfacial Reactions in Ti/Si1-xGex/Si(100)",
Microscopy and Microanalysis 2003, pp. 470-471, San Antonio, USA, Aug.
3-7, 2003.
- "Conductive Atomic Force Microscopy Analysis for Local
Electrical
Characteristics in Stressed SiO2 Gate Films", Y. Watanabe,
A.
Seko, H. Kondo, A. Sakai, S. Zaima, and Y. Yasuda, in Ext. Abstr. of
2003 International Conference on Solid State Device and Materials, pp.
72-73, Tokyo, Japan, Sep. 16-18, 2003.
- "HRTEM and EELS Analyses of Interfacial Nanostructures in Ti/Si1-xGex/Si(100)",
J. YaM., N. Tanaka, O. Nakatsuka, A. Sakai, S. Zaima, and Y. Yasuda, in
Ext. Abstr. of 2003 International Conference on Solid State Device and
Materials, pp. 86-87, Tokyo, Japan, Sep. 16-18, 2003.
- "Influence of structural variation of Ni silicide thin films on
electrical property for contact materials", K. Okubo, Y. Tsuchiya, O.
Nakatsuka, A. Sakai, S. Zaima, and Y. Yasuda, in Ext. Abstr. of 2003
International Conference on Solid State Device and Materials, pp.
502-503, Tokyo, Japan, Sep. 16-18, 2003.
- "Chemical Structure of HfO2/Si Interfacial Transition
Layer", M. Suzuki, K. Kimura, Y. Sugita, O. Nakatsuka, A. Sakai, S.
Zaima, T. Ishikawa, S. Shin, and T. Hattori, in Ext. Abstr. of 2003
International Conference on Solid State Device and Materials, pp.
818-819, Tokyo, Japan, Sep. 16-18, 2003.
- "Low temperature formation of epitaxial NiSi2 in
Ni/Ti/Si(100) system", O. Nakatsuka, K. Okubo, Y. Tsuchiya, A. Sakai,
S.
Zaima, and Y. Yasuda, in Abstr. of Advanced Metallization Conference:
Asian Session, pp. 72-73, Tokyo, Japan, Sept. 30-Oct. 1, 2003.
- "Influence of C incorporation on the initial growth of epitaxial
NiSi2 on Si(100)", E. Okada, S. Oida, O. Nakatsuka, A.
Sakai,
S. Zaima, and Y. Yasuda, in Abstr. of The 7th International Conference
on Atomically Controlled Surfaces, Interfaces and Nanostructures, p.
78,
Nara, Japan, Nov. 16-20, 2003.
- "Growth of silicon nanocrystals with high number density for
floating dot memory", S. Naito, M. Satake, H. Kondo, M. Sakashita, A.
Sakai, S. Zaima, and Y. Yasuda, in Abstr. of 2003 International
Microprocesses and Nanotechnology Conference, pp. 20-21, Tokyo, Japan,
Oct. 29-31, 2003.
- "Nanoscale analysis of local leakage currents in stressed gate
SiO2
films by conducting atomic force microscopy", H. Kondo, A. Seko, Y.
Watanabe, A. Sakai, S. Zaima, and Y. Yasuda, in Abstr. of 2003
Materials
Research Society Fall Meeting, Boston, USA, Dec. 1-5, 2003.
- "Praseodymiun silicate formation by post-growth high temperature
annealing", A. Sakai, S. Sakashita, M. Sakashita, S. Zaima, Y. Yasuda,
and S. Miyazaki, in Abstr. of 2003 Materials Research Society Fall
Meeting, Dec. 1-5, 2003, Boston, USA.
- "Detection of stress-induced defects in gate SiO2
films
by conducting atomic force microscopy", Y. Watanabe, A. Seko, H. Kondo,
A. Sakai, S. Zaima and Y. Yasuda, in Abstr. of The 11th International
Colloquium on Scanning Probe Microscopy, Shizuoka, Japan, Dec. 11-13,
2003.
- "Local discharging of carriers at nanometer scale defects in
gate
SiO2 thin films observed by conducting atomic force
microscopy", A. Seko, Y. Watanabe, H. Kondo, A. Sakai, S. Zaima, and Y.
Yasuda, in Abstr. of The 11th International Colloquium on Scanning
Probe
Microscopy, Shizuoka, Japan, Dec. 11-13, 2003.
2002
- [Invited]"Novel growth
method of thin strain-relaxed SiGe films on Si substrates", A. Sakai,
K.
Suhimoto, T. Yamamoto, M. Okada, H. Ikeda, O. Nakatsuka, S. Zaima, and
Y. Yasuda, Second International WorkShop on New Group IV (Si-Ge-C)
Semiconductors Control of Properties and Applications to Ultrahigh
Speed
and Opto-Electronic Devices, Kofu, Japan, Jun. 2-4, 2002.
- "Formation mechanism of low resistance contact in NiSi/Si system
Ni/Si", O. Nakatsuka, Y. Tsuchiya, A. Sakai, S. Zaima, and Y. Yasuda,
Second International WorkShop on New Group IV (Si-Ge-C) Semiconductors
Control of Properties and Applications to Ultrahigh Speed and
Opto-Electronic Devices, Kofu, Japan, Jun. 2-4, 2002.
- "Structural and electrical properties in Ni/Si(100) contacts",
Y.
Tsuchiya O. Nakatsuka, A. Sakai, S. Zaima, and Y. Yasuda, Second
International WorkShop on New Group IV (Si-Ge-C) Semiconductors Control
of Properties and Applications to Ultrahigh Speed and Opto-Electronic
Devices, Kofu, Japan, Jun. 2-4, 2002.
- "Effect of Ge on solid phase epitaxy of CoSi2 on
Si(100)", O. Nakatsuka, H. Onoda, H. Ikeda, A. Sakai, S. Zaima, and Y.
Yasuda, Second International WorkShop on New Group IV (Si-Ge-C)
Semiconductors Control of Properties and Applications to Ultrahigh
Speed
and Opto-Electronic Devices, Kofu, Japan, Jun. 2-4, 2002.
- "Control of residual strain in SiGe buffer layers on Si
substrates with ultra- thin Ge interlayers", T. Yamamoto, T. Egawa, O.
Nakatsuka, H. Ikeda, A. Sakai, S. Zaima, and Y. Yasuda, Second
International WorkShop on New Group IV (Si-Ge-C) Semiconductors Control
of Properties and Applications to Ultrahigh Speed and Opto-Electronic
Devices, Kofu, Japan, Jun. 2-4, 2002.
- "Surface smoothing of strain-relaxed SiGe layers on Si
substrates
in two-step strain relaxation procedure", T. Egawa, T. Yamamoto, O.
Nakatsuka, H. Ikeda, A. Sakai, S. Zaima, and Y. Yasuda, Second
International WorkShop on New Group IV (Si-Ge-C) Semiconductors Control
of Properties and Applications to Ultrahigh Speed and Opto-Electronic
Devices, Kofu, Japan, Jun. 2-4, 2002.
- [Invited]"Control in the
initial growth of heteroepitaxial Si1-x-yGexCy
on Si(100) substrates", S. Zaima, A. Sakai, and Y. Yasuda,
International
Conference on Solid Films and Surfaces, Marseille, France, Jul. 8-11,
2002.
- "Influence of Ge and C for reaction in Ni/p+-Si1-x-yGexCy/Si(100)
contacts", Y. Tsuchiya, O. Nakatsuka, A. Sakai, S. Zaima, J. Murota,
and Y. Yasuda, 2002 International Conference on Solid State Device and
Materials, Nagoya, Japan, Sep. 17-19, 2002.
- "Local leakage current of HfO2 thin films characterized by
conducting atomic force microscopy", H. Ikeda, T. Goto, M. Sakashita,
A.
Sakai, S. Zaima, and Y. Yasuda, 2002 International Conference on Solid
State Device and Materials, Nagoya, Japan, Sep. 17-19, 2002.
- "Structural and electrical properties of HfO2-TiO2
composite films formed by pulsed laser deposition", K. Honda, S. Goto,
M. Sakashita, H. Ikeda, A. Sakai, S. Zaima, and Y. Yasuda, 2002
International Conference on Solid State Device and Materials, Nagoya,
Japan, Sep.17-19, 2002.
- "Scanning tunneling microscopy of initial nitridation processes
on oxidized Si(100) surface with radical nitrogen", R. Takahashi, Y.
Kobayashi, H. Ikeda, M. Sakashita, O. Nakatsuka, A. Sakai, S. Zaima,
and
Y. Yasuda, 2002 International Conference on Solid State Device and
Materials, Nagoya, Japan, Sep. 17-19, 2002.
- "Novel nonvolatile random access memory with Si nanocrystals for
ultra low power scheme", A. Shibata, H. Kotaki, T. Ogura, N. Arai, K.
Adachi, S. Kakimoto, A. Kito, A. Sakai, S. Zaima, and Y. Yasuda, 2002
International Conference on Solid State Device and Materials, Nagoya,
Japan, Sep. 17-19, 2002.
- "Initial growth process of TiN films in ultra-high vacuum rapid
thermal chemical vapor deposition", Y. Okuda, S. Naito, O. Nakatsuka,
T.
Okuhara, A. Sakai, S. Zaima, and Y. Yasuda, Advanced Metallization
Conference 2002: 12th Asian Session, Tokyo, Japan, Oct. 29-30, 2002.
- "Low Resistance Contact with NiSi for sub-0.1 um Si ULSI
Devices", O. Nakatsuka, Y. Tsuchiya, A. Sakai, S. Zaima, and Y. Yasuda,
The 3rd Japan-Korrea Joint Workshop on Advanced Semiconductor Processes
and Equipments, Hakone, Japan, Oct. 29-30, 2002.
- "Effect of Al interlayer on two-step growth of CoSi2
on
Si(100)", E. Okada, H. Onoda, O. Nakatsuka, H. Ikeda, M. Sakashita, A.
Sakai, S. Zaima, and Y. Yasuda, Fourth International Symposium on
Control of Semiconductor Interfaces, Karuizawa, Japan, Oct. 21-25, 2002.
- "Epitaxial growth of CoSi2 films on oxygen-adsorbed
Si(100) surfaces", Y. Hayashi, A. Sakai, O. Nakatsuka, S. Zaima, and Y.
Yasuda, Fourth International Symposium on Control of Semiconductor
Interfaces, Karuizawa, Japan, Oct. 21-25, 2002.
- "Improvement in morphology of nickel silicide film with carbon",
O. Nakatsuka, Y. Tsuchiya, A. Sakai, S. Zaima, J. Murota, and Y.
Yasuda,
3rd International Workshop on Junction Technology 2002, Tokyo, Japan,
Dec. 2-3, 2002.
2001
- "Study on solid-phase reaction in Ti/p+-Si1-x-yGexCy/Si(100)
contacts", A. Tobioka, Yoshinori Tsuchiya, H. Ikeda, A. Sakai, Y.
Yasuda, S. Zaima, and J. Murota, European Materials Research Society
2001 Spring Meeting, Strasbourg, France, Jun. 5-8, 2001.
- "Formation of strain-relaxed SiGe films on Si substrates with cap
layers", K. Sugimoto, T. Yamamoto, M. Okada, H. Ikeda, A. Sakai, Y.
Yasuda, and S. Zaima, European Materials Research Society 2001 Spring
Meeting, Strasbourg, France, Jun. 5-8, 2001.
- "Electrical properties and solid-phase reactions in Ni/Si(100)
contacts", Y. Tsuchiya, A. Tobioka, H. Ikeda, A. Sakai, S. Zaima, and
Y.
Yasuda, 2001 International Conference on Solid State Devices and
Materials (SSDM2001), Tokyo, Japan, Sept. 26-28, 2001.
- "Growth processes and electrical characteristics of silicon
nitride films formed on Si(100) by radical nitrogen", H. Ikeda, D.
Matsushita, S. Naito, K. Ohmori, A. Sakai, S. Zaima, and Y. Yasuda,
2001
International Conference on Solid State Devices and Materials (SSDM
2001), Tokyo, Japan, Sept. 26-28, 2001.
- "Structural and electrical characteristics of HfO2
films fabricated by pulsed laser deposition", H. Ikeda, S. Goto, K.
Honda, M. Sakashita, A. Sakai, S. Zaima, and Y. Yasuda, 2001
International Conference on Solid State Devices and Materials (SSDM
2001), Tokyo, Japan, Sept. 26-28, 2001.
- [Invited]"Dislocations and
microstructure evolution in semiconductor thin films", A. Sakai, IUVSTA
15th International Vacuum Congress, AVS 48th International Symposium,
11th International Conference on Solid Surfaces, San Francisco, USA,
Oct. 28 - Nov.2, 2001.
- "Structural relaxation at SiO2/Si(100) interfaces
studied by coaxial impact collision ion scattering spectroscopy", H.
Ikeda, M. Wasekura, A. Sakai, S. Zaima, and Y. Yasuda, 15th
International Vacuum Congress (IVC), San Francisco, USA, 28 Oct.
28-Nov.
2, 2001.
- "Electrical Properties of Ni silicide/silicon contact", Y.
Tsuchiya, O. Nakatsuka, H. Ikeda, A. Sakai, S. Zaima, and Y. Yasuda,
Advanced Metallization Conference 2001 (ADMETA2001): Asian Session,
Tokyo, Japan, 30-31 Oct. 2001.
- "Study on solid phase Reactions in Ti/p+-Si1-x-yGexCy/Si(100)
contacts", A. Tobioka, Yoshinori Tsuchiya, O. Nakatsuka, H. Ikeda, A.
Sakai, S. Zaima, and Y. Yasuda, Advanced Metallization Conference 2001
(ADMETA2001): Asian Session, Tokyo, Japan,Oct. 30-31, 2001.
- "Formation of TiN films by ultra-high vacuum rapid thermal
chemical vapor deposition", S. Naito, M. Okada, O. Nakatsuka, T.
Okuhara, A. Sakai, S. Zaima, and Y. Yasuda, Advanced Metallization
Conference 2001 (ADMETA2001): Asian Session, Tokyo, Japan, Oct. 30-31,
2001.
- "Ultra-high vacuum rapid thermal chemical vapor deposition for
the formation of TiN films as barrier metal", S. Naito, M. Okada, O.
Nakatsuka, M. Sakashita, T. Okuhara, A. Sakai, S. Zaima, and Y. Yasuda,
2001 International Conference on Rapid Thermal Processing for Future
Semiconductor Devices, Mie, Japan, Nov. 14-16, 2001.
- "Effect of rapid thermal annealing on structural and electrical
properties of HfO2 films formed by pulsed laser deposition",
K. Honda, S. Goto, M. Sakashita, H. Ikeda, A. Sakai, S. Zaima, and Y.
Yasuda, 2001 International Conference on Rapid Thermal Processing for
Future Semiconductor Devices, Mie, Japan, Nov. 14-16, 2001.